2000 Publications

2000 | 2001 | 2002 | 2003 | 2004 | 2005 | 2006 | 2007 | 2008 | 2009

The year 2000 brought on a slew of invited publications on MEMS-based communication architectures as well as numerous advances in RF MEMS devices, both vibrating and non-vibrating. The year began with publication of the first dog bone serpentine spring-suspended RF MEMS switch–something repeated multiple times by other researchers in the MTT RF MEMS arena. In addition, a tunable capacitor based on a movable dielectric (as opposed to the movable conductors of earlier renditions) introduced a method to raise the Q of such devices. The year also saw the first paper looking into temperature compensation of micromechanical beam resonators using geometric stress-compensation, which made more plausible the use of MEMS for timing and frequency control applications. Finally, the first paper to introduce a radial contour-mode micromechanical disk resonator appeared in this year as a precursor to a countless more papers from the field using disks, rings, and other bulk resonance modes towards much higher frequencies.

F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, “High frequency micromechanical filters,” IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000. (15 pages)

C. T.-C. Nguyen, “Micromechanical circuits for communications (invited),” Proceedings, 2000 Int. Conference on High Density Interconnect and Systems Packaging, Denver, Colorado, April 25-28, 2000, pp. 112-117.

S. Pacheco, L. P. B. Katehi, and C. T.-C. Nguyen, “Design of low actuation voltage RF MEMS switches,” Proceedings, IEEE MTT-S International Microwave Symposium, Boston, Massachusetts, June 11-16, 2000.

C. T.-C. Nguyen, “Communication architectures based on high-Q MEMS devices (invited),” Workshop Notes, Workshop on Microwave and Photonic Applications of MEMS at the 2000 IEEE MTT-S International Microwave Symposium, Anaheim, California, June 16, 2000.

C. T.-C. Nguyen, “Transceiver front-end architectures using high-Q micromechanical resonators (invited),” Proceedings, IEEE European MIDAS Workshop, University of Surrey, United Kingdom, July 17-18, 2000.

K. Wang, A.-C. Wong, and C. T.-C. Nguyen, “VHF free-free beam high-Q micromechanical resonators,” IEEE/ASME J. Microelectromech. Syst., vol. 9, no. 3, pp. 347-360, Sept. 2000. (14 pages)

C. T.-C. Nguyen, “Micromechanical circuits for wireless communications (invited plenary),” Proceedings, 2000 European Solid-State Device Research Conference, Cork, Ireland, September 11-13, 2000, pp. 2-12.

C. T.-C. Nguyen, “Micromechanical circuits for communication transceivers (invited),” Proceedings, 2000 Bipolar/BiCMOS Circuits and Technology Meeting (BCTM), Minneapolis, Minnesota, September 25-26, 2000, pp. 142-149.

J.-B. Yoon and C. T.-C. Nguyen, “A high-Q tunable micromechanical capacitor with movable dielectric for RF applications,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 11-13, 2000, pp. 489-492.

W.-T. Hsu, J. R. Clark, and C. T.-C. Nguyen, “Mechanically temperature compensated flexural-mode micromechanical resonators,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 11-13, 2000, pp. 493-496.

J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, “High-Q VHF micromechanical contour-mode disk resonators,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 11-13, 2000, pp. 399-402.