2007 Publications

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  • Medium-Scale Integrated Purely Micromechanical Differential Disk Array Filter [2007]
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  • Quality Factor Boosting Via Mechanically Coupled Arraying [2007]
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The year 2007 brought on the most complex micromechanical circuit up to this point: A differential disk array-composite spring coupled filter that introduced many of the major micromechanical circuit design methods to guide later more complex circuits, including hierarchical topologies, arraying for reduced motional resistance, differential balanced design for mode suppression, and defensive coupling design. Mechanical coupling for Q boosting also arrived this year that would eventually drive future optomechanical oscillator designs.

C. T.-C. Nguyen, “MEMS technology for timing and frequency control,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 2, pp. 251-270, Feb. 2007 (20 pages). (2007 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Best Paper Award Winner)

S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “A micromechanical parallel-class disk-array filter,” Proceedings, 2007 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361.

L.-W. Hung, Y. Xie, Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF micromechanical compound-(2,4) mode ring resonators with Solid-Gap Transducers,” Proceedings, 2006 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375.

Y. Lin, J. Wang, S. Pietrangelo, Z. Ren, and C. T.-C. Nguyen, “Effect of electrode configuration on the frequency and quality factor repeatability of RF micromechanical disk resonators,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 11-14, 2007, pp. 2461-2464.

Y.-W. Lin, L.-W. Hung, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Quality factor boosting via mechanically-coupled arraying,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 11-14, 2007, pp. 2453-2456.

W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF nickel micromechanical spoke-supported ring resonators,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 11-14, 2007, pp. 323-326.

S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “An MSI micromechanical differential disk-array filter,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 11-14, 2007, pp. 307-311.