2003 Publications

2000 | 2001 | 2002 | 2003 | 2004 | 2005 | 2006 | 2007 | 2008 | 2009

  • 1.47-GHz Extensional Wine-Glass Ring Resonator [2003 IEDM Roger A. Haken Best Paper Award Winner]
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  • 1st Micromechanical Resonator Operating >1 GHz — Polysilicon Radial-Contour Mode Disk Resonator [2003]
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  • 1st Wine-Glass Disk Resonator [2003]
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  • 5-Resonator Mechanically Coupled Square-Plate Array [2003]
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The year 2003 saw considerable advancements in polysilicon resonator performance with the first bulk-mode MEMS resonators (a disk and a ring) to exceed gigahertz frequency, the first extremely high-Q wine-glass disk resonators, and the first micromechanical resonator arrays — all advancements destined to shape future approaches to high frequency high-Q MEMS resonator design for both oscillators . This year also brought on new transistor oscillator designs, including a series resonant design that offered differential noise cancellation while providing flexibility in phase inversion, as well as the first instance of automatic-level control to improve phase noise.

M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen, “Stemless wine-glass-mode disk micromechanical resonators,” Proceedings, 16th Int. IEEE Micro Electro Mechanical Systems Conf., Kyoto, Japan, Jan. 19.-23, 2003, pp. 698-701.

C. T.-C. Nguyen, “MEMS technologies for communications (invited keynote),” Tech. Proceedings, 2003 Nanotechnology Conference and Trade Show, San Francisco, California, February 23-27, 2003, pp. 452-455.

J. E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang, and C. T.-C. Nguyen, “Diamond materials for MEMS and NEMS structures and devices,” Tech. Proceedings, 2003 Nanotechnology Conference and Trade Show, San Francisco, California, February 23-27, 2003, pp. 474-477.

S. Lee and C. T.-C. Nguyen, “Influence of automatic level control on micromechanical resonator oscillator phase noise,” Proceedings, 2003 IEEE Int. Frequency Control Symposium, Tampa, Florida, May 5-8, 2003, pp. 341-349.

J. R. Clark, M. A. Abdelmoneum, C. T.-C. Nguyen, “UHF high-order radial-contour mode disk resonators,” Proceedings, 2003 IEEE Int. Frequency Control Symposium, Tampa, Florida, May 5-8, 2003, pp. 802-809.

M. U. Demirci and C. T.-C. Nguyen, “Higher-mode free-free beam micromechanical resonators,” Proceed­ings, 2003 IEEE Int. Frequency Control Symposium, Tampa, Florida, May 5-8, 2003, pp. 810-818.

J. Wang, Z. Ren, and C. T.-C. Nguyen, “1.14-GHz self-aligned vibrating micromechanical disk resonator,” Tech. Digest, 2003 Radio Frequency Integrated Circuits Symposium, Philadelphia, Pennsylvania, June 8-10, 2003, pp. 335-338.

M. U. Demirci, M. A. Abdelmoneum, and C. T.-C. Nguyen, “Mechanically corner-coupled square microresonator array for reduced series motional resistance,” Dig. of Tech. Papers, the 12th Int. Conf. on Solid-State Sensors & Actuators (Transducers’03), Boston, Massachusetts, June 8-12, 2003, pp. 955-958.

J. Wang, Z. Ren, and C. T.-C. Nguyen, “Self-aligned 1.14-GHz vibrating radial-mode disk resonators,” Dig. of Tech. Papers, the 12th Int. Conf. on Solid-State Sensors & Actuators (Transducers’03), Boston, Massa­chusetts, June 8-12, 2003, pp. 947-950.

Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “UHF micromechanical extensional wine-glass mode ring resonators” Technical Digest, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 953-956. (best paper award winner)

Y.-W. Lin, S. Lee, Z. Ren, and C. T.-C. Nguyen, “Series-resonant micromechanical resonator oscillator,” Technical Digest, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 961-964.