2006 Publications

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  • Methods for Nulling Spurious Modes in Disk Array Filters [2006]
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  • 1st On-Chip VHF Nickel Micromechanical Resonator to Achieve Q >50,000 [2006]
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2006 was the year I left DARPA and went back to Michigan, then moved out to UC Berkeley. Still, the year produced some important results, including the first disk resonator-based spring-coupled filter–a precursor to the next year’s transformational design–and the first stemless disk resonator (in nickel) supported by solid electrode-to-resonator gaps.

S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Disk-array design for suppression of unwanted modes in micromechanical composite-array filters,” Tech. Digest, 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS’06), Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869.

C. T.-C. Nguyen, “MEMS technologies and devices for single-chip RF front-ends (invited),” 2005 IMAPS/ACerS Int. Conf. on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Tech. Dig., Denver, Colorado, April 25-26, 2006.

W.-L. Huang, Z. Ren, and C. T.-C. Nguyen, “Nickel vibrating micromechanical disk resonator with solid dielectric capacitive-transducer gap,” Proceedings, 2006 IEEE Int. Frequency Control Symp., Miami, Florida, June 5-7, 2006, pp. 839-847.

C. T.-C. Nguyen, “Towards LSI vibrating micromechanical signal processors (invited),” Proceedings of the 32nd Int. Conference on Micro- and Nano-Engineering, Barcelona, Spain, Sept. 17-20, 2006, pp. 69-70.

C. T.-C. Nguyen, “Integrated micromechanical circuits for RF front ends (invited),” Proceedings of the 36th European Solid-State Device Research Conference, Montreux, Switzerland, Sept. 19-21, 2006, pp. 7-16.

C. T.-C. Nguyen, “Integrated micromechanical circuits fueled by vibrating RF MEMS technology,” Proceedings, IEEE Int. Ultrasonics Symposium, Oct. 2-6, 2006, pp. 953-962.

M. Demirci and C. T.-C. Nguyen, “Mechanically corner-coupled square microresonator array for reduced series motional resistance,” IEEE/ASME J. Microelectromech. Syst., vol. 15, no. 6, pp. 1419-1436, Dec. 2006. (18 pages)