2020 Publications

2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 | 2027 | 2028 | 2029

  • Single-Digit-Nm Capacitive-Gap Transducer Micromechanical Disk Resonator With Q >10,000 and Motional Resistance < 150 Ohms [2020]
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  • Resonant Beam Strain Sensor Employing Gap-Dependent Frequency Shift [2020]
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  • 60-MHz Micromechanical Wine-Glass Disk Pierce Oscillator Setting a Best-in-Class 1-kHz offset FoM of -231 dB [2020]
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  • 199-MHz MEMS Disk Array-Composite Pierce Oscillator [Best Ppaer Award Winner, 2020]
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The year 2020 finally brought about the first capacitive-gap transduced VHF micromechanical resonators with single-digit nanometer gaps with all the advertised electromechanical coupling and preserved Q advantages and poised to transform the application space for on-chip MEMS resonators. It also introduced a lower frequency version of the electrical-stiffness-based resonant strain sensor of the previous year and produced two ground-breaking MEMS-based oscillator papers: a journal paper teaching detailed MEMS-based Pierce oscillator analysis and design methodology; and a conference paper employing a 199-MHz disk array-composite resonator in a Pierce circuit that garnered a best paper award.

A. Ozgurluk, K. A. Peleaux, C. T.-C. Nguyen, “Single-digit-nm capacitive-gap transduced micromechanical disk resonators,” Tech. Digest, 2020 IEEE Int. Micro Electromechanical Systems Conference, Vancouver, Canada, Jan. 18-22, 2020, pp. 222-225.

T. L. Naing, T. O. Rocheleau, E. Alon, and C. T.-C. Nguyen, “Low-power MEMS-based Pierce oscillator using a 61-MHz capacitive-gap disk resonator,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 67, no. 7, pp. 1377-1391, July 2020, online in Jan. 2020, DOI: 10.1109/TUFFC.2020.2969530. (15 pages)

A. Ozgurluk and C. T.-C. Nguyen, “Precision residual strain sensor employing gap-dependent frequency shift,” Proceedings, IEEE Joint Conf. of the IEEE Int. Frequency Contr. Symp. & IEEE Int. Symp. on Applications of Ferroelectrics, Virtual Conference, July 19-23, 2020, DOI: 10.1109/IFCS-ISAF41089.2020.9234911.

Q. Xie, S. Afshar, A. Ozgurluk, and C. T.-C. Nguyen, “199-MHz polysilicon micromechanical disk array-composite oscillator,” Proceedings, IEEE Joint Conf. of the IEEE Int. Frequency Contr. Symp. & IEEE Int. Symp. on Applications of Ferroelectrics, Virtual Conference, July 19-23, 2020, DOI: 10.1109/IFCS-ISAF41089.2020.9234862. (best paper award winner)