2004 Publications

2000 | 2001 | 2002 | 2003 | 2004 | 2005 | 2006 | 2007 | 2008 | 2009

  • 1.5-GHz Diamond Disk Resonator With Q >10,000 in Both Air and Vacuum — held the record on-chip freq.-Q product at 500 MHz [2004]
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  • 1.2-GHz Polysilicon “Hollow Disk” Resonator Using Isolating Supports for Q=14,600 [2004]
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  • 60-MHz Wine-Glass Disk Oscillator Nearly Makes the GSM Reference Oscillator Phase Noise Spec [2004]
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  • Resonator Array Oscillator Wins 2004 UFFC Symposium Best Frequency Control Paper Award [2004]
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  • Vibrating RF MEMS Wins Best Invited Paper Award at the 2004 IEEE Custom Integrated Circuits Conference [2004]
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The year 2004 delivered sheer advancements in performance as well as a couple of best paper awards. Specifically, the first diamond disk resonator achieved 1.5-GHz frequency and at 500 MHz posted the record frequency-Q product (at the time, but eventually bested by one of our later resonators) and the first 1.2-GHz polysilicon breathing mode ring posted the highest frequency-Q product in polysilicon structural material. MEMS-based oscillator performance also continued to approach difficult GSM cell phone specs, while new methods for improving phase noise performance via MEMS emerged, such as the use of mechanical-coupled arraying to force all array resonators to the same mode frequency, allowing summation of outputs to improve power handling. Such coupling would eventually become instrumental to enabling future micromechanical filters and displacement amplifiers at high frequencies. From the filter front, 2004 also introduced the first bridged micromechanical filter, which confirmed an ability to raise mechanical circuit complexity towards improved stopband rejection performance. In addition to all of this, investigations confirmed the efficacy of laser trimming to correct the passbands of filters, even when using resonators with tiny dimensions.

S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Micromechanical hollow-disk ring resonators,” Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 821-824.

J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen, “1.51-GHz polydiamond micromechanical disk resonator with impedance-mismatched isolating support,” Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 641-644.

A.-C. Wong and C. T.-C. Nguyen, “Micromechanical mixer-filters (“mixlers”),” IEEE/ASME J. Microelectromech. Syst., vol. 13, no. 1, pp. 100-112, Feb. 2004. (13 pages)

Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “60-MHz wine glass micromechanical disk reference oscillator,” Digest of Technical Papers, 2004 IEEE International Solid-State Circuits Confer­ence, San Francisco, California, Feb. 15-19, 2004, pp. 322-323.

S. Lee and C. T.-C. Nguyen, “Phase noise amplitude dependence in self-limiting wine-glass disk oscillators,” Tech. Digest, 2002 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, June 6-10, 2004, pp. 33-36.

S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Bridged micromechanical filters,” Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 144-150.

M. A. Abdelmoneum, M. U. Demirci, Y.-W. Lin, and C. T.-C. Nguyen, “Location-dependent tuning of vibrating micromechanical resonators via laser trimming,” Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 272-279.

S. Lee and C. T.-C. Nguyen, “Mechanically-coupled micromechanical arrays for improved phase noise,” Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286. (best paper award winner)

C. T.-C. Nguyen, “Vibrating RF MEMS for next generation wireless applications,” Proceedings, 2004 IEEE Custom Integrated Circuits Conf., Orlando, Florida, Oct. 3-6, 2004, pp. 257-264. (best paper award winner)

J. Wang, Z. Ren, and C. T.-C. Nguyen, “1.156-GHz self-aligned vibrating micromechanical disk resonator,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004. (22 pages)

Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, C. T.-C. Nguyen, “Series-resonant VHF micromechanical resonator reference oscillators,” IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004. (15 pages)

M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, “Post-fabrication laser trimming of micromechanical filters,” Technical Digest, IEEE Int. Electron Devices Mtg., San Francisco, California, Dec. 13-15,  2004, pp. 39-42.