Professor in the Graduate School
Department of Electrical Engineering and Computer Sciences
Room 261M Cory Hall
University of California at Berkeley
Berkeley, CA 94720-1770, U.S.A.
Office phone: 510-643-6632
Fax: 510-643-7846
lieber@eecs.berkeley.edu
Administrative assistance: 253 Cory Hall
Tel +1 (510) 642-2348
RESEARCH
Research Interests
Talks
Resume
List of Publications
Textbook: Regular and Chaotic
Dynamics
Textbook: Principles of Plasma
Discharges and Materials Processing
First Edition Errata: download pdf file
Second Edition Errata (January 4, 2018): download pdf file
Chinese Language Errata: download pdf file
Current research is supported by the Department of Energy Office of Fusion Energy Sciences through the University of Michigan Plasma Science Center, and by Applied Materials/Display (AKT). A list of projects during 2018-2019 follows:
Nonlinearity and Waves in Capacitive Discharges (2.7 MB pdf file, 50 min talk at Applied Materials, Sunnyvale, CA, 12 August 2019)
Nonlinear Electromagnetics Model of an Asymmetrically Driven Capacitive Discharge (0.48 MB pdf file, 15 min talk at the Gaseous Electronics Converence, Pittsburg, PA, 6 - 10 November 2017)
Day 1 of Two Day Short Course on "Principles of Plasma Discharges and Materials Processing" (4.4 MB pdf file, 6 hours of lecture material, March 15, 2015)
Day 2 of Two Day Short Course on "Principles of Plasma Discharges and Materials Processing" (6.1 MB pdf file, 6 hours of lecture material, March 15, 2015)
Nonlinear Standing Wave Excitation by Series-Resonance Enhanced Harmonics in Low Pressure Capacitive Discharges (0.5 MB pdf file, 15 min talk at the Gaseous Electronics Converence, Honolulu, HI, 12 - 16 October 2015)
Modeling and Simulation of Low Temperature Plasma Discharges (1 MB pdf file, 25 min talk at the DOE Plasma Science Center Annual Meeting, College Park, MD, 10-11 June 2015)
Hybrid Global Model Simulations of He/N2 and He/H2O Atmospheric Pressure Capacitive Discharges (1.1 MB pdf file, 15 min talk at the Gaseous Electronics Converence, Raleigh, NC, 3 - 7 November 2014)
The Emergence of Plasma Processing (700 KB pdf file, 35 min invited talk at the American Vacuum Society 60th International Symposium and Exhibition, Long Beach, CA, 27 October - 1 November 2013)
Introduction to Gas Discharges and Plasma Processing (2.1 MB pdf file, 4 hour preconference tutorial at the 66th Gaseous Electronics Conference, Princeton, NJ, 28 September - 4 October 2013)
Narrow Gap Electronegative Capacitive Discharges and Stochastic Heating (970 kB pdf file, 40 min talk at the 4th RF Workshop emphasizing stochastic heating, 29-31 May 2013, Giens, France)
Narrow Gap Electronegative Capacitive Discharges and Stochastic Heating
(700 kB pdf file, 25 min talk at the DOE Plasma Science Center Annual Meeting, 15-16 May
2013, College Park, MD); ( Powerpoint version, 1.4 MB)
Modeling Plasma Processing Discharges
(556 kB pdf file, 30 min talk at the DOE Plasma Science Center Annual Meeting, 17-18 May
2012, Princeton, NJ)
Fast Analytical/Numerical Model of Atmospheric Pressure
Radio-Frequency Capacitive Discharges
(0.6 MB pdf file, 25 min invited talk at the
64th Gaseous Electronics Conference, Salt Lake City, Utah, 14-18 November 2011)
A Mini-Course on the Principles of Low-Pressure Discharges
and Materials Processing
(2.1 MB pdf file, 4 hour short course at the
15th European Summer School on Low Temperature Plasma
Physics, Bad Honnef, Germany, 10-16 October 2010)
Plasma Processing for Nanoelectronics --- History and
Prospects
(2.3 MB pdf file, 30 min invited talk at the
63rd Gaseous Electronics Conference, Paris, France, 4-8 October 2010)
Sheath Dynamics and Energetic Particle Distributions on
Substrates
(1.7 MB pdf file, 30 min invited talk at the 10th Asia-Pacific Conference on Plasma Science and
Technology, 6 July 2010, Jeju Island, Korea)
A Mini-Course on the Principles of Low-Pressure Discharges
and Materials Processing
(2.1 MB pdf file, 4 hour short course at the 10th Asia-Pacific Conference on Plasma Science and
Technology, 4 July 2010, Jeju Island, Korea)
Kinetic Effects in Plasma Processing Discharges
(1.7 MB pdf file, 15 min talk at the DOE Plasma Science Center Annual Meeting, 10-11 May
2010, Ann Arbor, MI)
Sheath Dynamics and Energetic Particle Distributions on
Substrates
(880 KB pdf file, 25 min invited talk at the 62nd Gaseous Electronics Conference, 20-23 September
2009, Saratoga Springs, NY)
Adventures in Two-Dimensional Particle-In-Cell
Simulations of Electronegative Discharges: (1) Double Layers in a Two-Region Discharge; (2)
Transport in a Magnetized Discharge
(500 KB pdf file, 1 hour talk at Ecole Polytechnique, France, 24 September 2009
Double Layer Formation in a Two Region Electronegative
Discharge
(360 KB pdf file, 20 minute contributed talk at the 19th International
Symposium on Plasma Chemistry, Bochum, Germany, 26-31 July 2009; also, 424 KB animated gif file showing unstable slow and fast waves
generated downstream and traveling upstream into the double layer)
Recent Progress on the Physics of
Capacitive Discharges
(2.0 MB pdf file, 45 minute plenary talk at the 9th Asia-Pacific Conference on
Plasma Science and Technology, Huangshan, China, 8-11 October 2008);
Recent Progress on the Physics of
Capacitive Discharges (1 hour extended version, 2.2 MB pdf
file)
Nanoelectronics and Plasma Processing -
The Next 15 Years and Beyond
(2.3 MB pdf file, One hour colloquium at Princeton Plasma
Physics Laboratory,
Princeton, NJ, 31 October 2007)
A Mini-Course on the
Principles of Low-Pressure Discharges and Materials Processing
(1.4 MB pdf file, 3 hour lecture, IUPAC Summer School on Plasma
Chemistry
for Materials Processing, Kyoto, Japan, 23-25 August 2007; 4 hour
lecture, 12th European Summer School on Low Temperature Plasma
Physics, Bad Honnef, Germany, 6-11 October 2007)
Capacitive Discharges Driven by
Combined DC/RF Sources
(1.9 MB pdf file, contributed 15 minute talk at the 60th Gaseous Electronics
Conference, Arlington, VA, 2-5 October 2007)
Modeling and Simulation of
Electromagnetic Effects in Capacitive Discharges
(504 kB pdf file, poster presentation at the 60th Gaseous Electronics
Conference, Arlington, VA, 2-5 October 2007)
Recent Progress on the Physics of
Capacitive Discharges
(3.5 MB pdf file, Invited talk at the Workshop on Radio Frequency
Discharges, All Hallows College, Dublin, Ireland, 11-13 June 2007)
Nanoelectronics and Plasma Processing -
The Next 15 Years and Beyond
(2 MB pdf file, Allis Prize invited half-hour talk at the 2007 Meeting of the
Division of Atomic, Molecular and Optical Physics, American Physical Society,
Calgary, Alberta, Canada,
June 5 - 9, 2007)
Fermi Acceleration - From Cosmic Rays to
Discharge Heating
(867 kB pdf file, Allis Prize 20 minute invited talk at the 48th Annual
Meeting, Division of Plasma Physics, American Physical Society,
October 30 - November 3, 2006)
Nanoelectronics and Plasma Processing -
The Next 15 Years and Beyond
(452 kB pdf file, Allis Prize one hour talk at the 59th Gaseous Electronics
Conference, Columbus, OH, 9-13 October 2006)
Plasma, Sheaths, and
Surfaces - The Discharge Science of Irving Langmuir
(5.4 MB pdf file, Foundation Talk at the 58th
Gaseous Electronics Conference, San Jose, CA, 16-20 October
2005)
Plasma Processing in the
21st Century (15.4 MB pdf file, general talk for
graduate students)
Plasma Processing in the
21st Century (9.5 MB pdf file, advanced talk
including a thorough presentation of dual/high frequency capacitive
discharge physics)
Fermi Acceleration Revisited -
From Cosmic Rays to Discharge Heating (3.9 MB pdf file,
one hour historical talk on stochastic heating)
Ignition Conditions for
Peripheral Plasma in a Grounded Chamber Connected to a Dual
Frequency Capacitive Discharge (0.9 MB pdf file,
breakdown issues in capacitive discharges)
Michael A. Lieberman received his B.S. and M.S. degrees from the
Massachusetts Institute of Technology in 1962 and his Ph.D. degree from
Massachusetts Institute of Technology in 1966. He joined the Department of Electrical
Engineering and Computer Sciences (EECS) at Berkeley in 1966. In
1971, he received the Distinguished Teaching Award of the Berkeley
campus. He was a Guggenheim Fellow during 1972-3. He is a Fellow of
the American Physical Society (APS), the American Association for the
Advancement of Science (AAAS), the Institute of Electrical and
Electronic Engineers (IEEE), the American Vacuum Society,
the Institute of Physics (Great Britain), and the International
Plasma Chemistry Society.
He received the IEEE Plasma Science and
Applications Award in 1995, the von Engel Prize of the
International Union of Pure and Applied Physics in 2005, and the American
Physical Society Will Allis Prize for Study of Ionized Gases in 2006.
Professor Lieberman's research interests are plasma processing of
materials, plasma modeling and diagnostics. He has also collaborated with
Prof. A.J.
Lichtenberg on research in nonlinear dynamics. His monograph,
co-authored with A.J. Lichtenberg, Regular and Stochastic
Motion, was published by Springer-Verlag in 1983. A second
edition, Regular and
Chaotic Dynamics, was published in 1991. His latest book, also
co-authored with A.J. Lichtenberg,
Principles of Plasma Discharges and Materials Processing, was
published by John Wiley and Sons in 1994. An expanded
second edition was published in 2005, a Chinese language edition
in 2007, and a Japanese language edition in 2010.
Erratas for both the first and second editions are available (see above):
Resume
