Michael A. Lieberman
Department of Electrical Engineering and Computer Sciences
University of California, Berkeley
Publications by M.A. Lieberman (in refereed journals)

``Plasma Density Measurement by Cavity Perturbation in
High Density Plasma,'' (with A. J. Lichtenberg),
Phys. Fluids,
12,
1969.

``Solution of FokkerPlanck Equation for MirrorConfined,
Hot Electron Plasmas,''
Phys. Fluids,
13,
1970.

``Verification of a Classical, SelfConsistent Theory
of Particle Loss in a Hot Electron, Magnetic Mirror
Compression Experiment,'' (with A. J. Lichtenberg and
T. Takeshita),
Plasma Phys.,
13,
141, 1971.

``Diagnostics for HotElectron, Magnetically Confined
Plasmas,'' (with A. J. Lichtenberg and M.J. Schwartz),
Plasma Phys.,
13,
89, 1971.

``Stochastic and Adiabatic Behavior of Particles
Accelerated by Periodic Forces,'' (with A. J. Lichtenberg)
Phys. Rev.,
A.,
1852, 1972.

``Multiple Mirror Confinement of Plasmas,'' (with B. Grant
Logan, A. J. Lichtenberg and A. Makhijani),
Phys. Rev. Lett.,
28,
144, 1972.

``Experimental Evidence of MultipleMirror Plasma
Confinement,'' (with B. Grant Logan, I. G. Brown and
A. J. Lichtenberg),
Phys. Rev. Lett.,
29,
1435, 1972.

``Theory of Electron Cyclotron Resonance Heating I:
Short Time and Adiabatic Effects,'' (with A. J. Lichtenberg
and F. Jaeger),
Plasma Phys.,
14,
1073, 1972.

``Theory of Electron Cyclotron Resonance Heating II: Long
Time and Stochastic Effects,'' (with A. J. Lichtenberg)
Plasma Phys.,
15,
125, 1973.

``Production of Alkali Plasmas by Photoionization,''
(with M. Luksenberg and T. Berg),
Rev. Sci. Instr.,
44,
35, 1973.

``Shielding of Moving Test Particles in Warm, Isotropic
Plasmas,'' (with L. Chen and A. B. Langdon),
J. Plasma Phys.,
9,
311, 1973.

``Observation of Ion Heating Near Cyclotron Harmonics Using an
RF Modulated Electron Beam,'' (with C. L. Hsieh and T. A.
Shepp),
Phys. Fluids,
16,
203, 1973.

``Magnetic Compression and Electron Cyclotron Heating
of a Low Temperature, Lithium Plasma,'' (with J. Kim)
Phys. Fluids,
17,
559, 1974.

``Plasma Confinement in MultipleMirror Systems I: Theory,''
(with A. J. Makhijani, A. J. Lichtenberg and B. Grant
Logan),
Phys. Fluids,
17,
1291, 1974.

``Plasma Confinement in MultipleMirror System II: Experiment
and Reactor Calculation,'' (with B. Grant Logan, I. G. Brown
and A. J. Lichtenberg),
Phys. Fluids,
17,
1302, 1974.

``Low Impedance Intense Electron Beam Device,'' (with
B. Myers and S. Eylon),
Rev. Sci. Instr.,
46,
1399, 1975.

``Electron Cyclotron Resonance Heating in a Pulsed Mirror
Experiment,'' (with N. Convers Wyeth and A. J. Lichtenberg),
Plasma Phys.,
17,
679, 1975.

``United States Uranium Resources: An Analysis of
Historical Data,''
Science,
192,
431, 1976.

``Cold Plasma Stabilization of a MirrorConfined,
Hot Electron Plasma,'' (with I. G. Brown, A. J. Lichtenberg
and N. Convers Wyeth),
Phys. Fluids,
19, 1203, 1976.

``MultipleMirror Confinement with CollisionIndependent
Scattering,'' (with A. J. Lichtenberg),
Nucl. Fusion,
16, 533, 1976.

``Power Balance and Impurity Effect in TwoComponent,
Multiple Mirror Reactors,'' (with S. T. Yang),
Nucl. Fusion,
17, 597, 1977.

``Axial Feedback Stabilization of Flute
Mode in a Mirror Confined Plasma,'' (with S. L. Wong),
Plasma Phys.,
19, 745, 1977.

``Reply to Comments on Uranium Resources (Letter),''
Science,
196, 604608, (6 May 1977).

``Axial Feedback Stabilization of Flute Mode in
a Multiple Mirror,'' (with S. L. Wong),
Plasma Phys,
20, 403 (1978).

``Two Component Multiple Mirror Reactor with
Depressed Ion Temperature,'' (with S. T. Yang),
Nucl. Fusion,
18, 965 (1978).

``MinimumAverageB Wells in Linked, Magnetic
Mirror Fields,'' (with J. C. Riordan and A. J. Lichtenberg),
Nucl. Fusion,
19, 21 (1979).

Energy and Power
(textbook, with M. C. Branch and L. M. Grossman),
Chapters on ``Energy Resources'' (completed), ``Energy
Consumption'', ``Electric Energy'', and ``Controlled Fusion''
(completed), in preparation.

``MHD Stabilization of Finite Beta Multiple Mirror Plasmas,''
(with M. Tuszewski, D. Price, R. Bravenec, K. Doniger,
C. Hartman, and A. J. Lichtenberg),
Nucl. Fusion
19, 1244 (1979).

``Diffusion in Near Integrable Hamiltonian Systems with
Three Degrees of Freedom,'' (with J. L. Tennyson and
A. J. Lichtenberg), in
Nonlinear Dynamics and the BeamBeam Interaction,
M. Month and A. G. Herrara, eds., AIP Conf. Proc. No. 57,
272301, (American Institute of Physics, New York, 1979).

``Arnold Diffusion in Hamiltonian Systems with Three
Degrees of Freedom,''
Ann. NY Acad. Sci.,
327 (1980).

``Fermi Acceleration Revisited,'' (with A. J. Lichtenberg and
R. H. Cohen),
Physica
D 1, 291 (1980).

``Radial Losses in High Beta Multiple Mirror Plasmas,''
(with M. Tuszewski),
Phys. Fluid
24, 320 (1981).

``Viscous Plasma Flow in a MultipleMirror Configuration,''
(with R. V. Bravenec, A. J. Lichtenberg, and H. Berk),
Phys. Fluids 24,
1320 (1981).

``Theory of Multifrequency ECRH,'' (with J. E. Howard,
A. J. Lichtenberg, and R. H. Cohen), Conference Proceedings
of the 2nd Workshop on Hot Electron Ring Physics,
San Diego, California, December 13, 1981,
(N. Uckan, ed.), Vol. 2, p. 561.

Regular and Stochastic Motion
(with A. J. Lichtenberg)
SpringerVerlag New York, Inc., 499 pages, 1983.
Also
translated into Russian (1984)

``Chaotic Motion Along Resonance Layers in NearIntegrable
Hamiltonian Systems with Three or More Freedoms,''
(with J. L. Tennyson), in
LongTime Prediction in Dynamics
(C. W. Horton, Jr., L. E. Reichl, and
V. Szebehely, eds., J. Wiley, New York, 1983).

``TwoFrequency Fermi Mapping,'' (with J. E. Howard and
A. J. Lichtenberg),
Physica 5D,
243 (1982).

``Effects of Ambipolar Potential on Multiple Mirror
Confinement,'' (with F. Najmabadi and A. J. Lichtenberg)
Phys. Fluids 26,
1018 (1983).

``Parameter Optimizations of Multiple Mirror Reactors,''
(with F. Najmabadi and A. J. Lichtenberg)
Nuclear Fusion 23,
609 (1983).

``Radial and Axial Losses in a MultipleMirror Experiment''
(with H. D. Price, A. J. Lichtenberg and M. Tuszewski),
Nucl. Fusion 23,
1043 (1983).

``Analytical Calculation of Invariant Distributions on
Strange Attractors,'' (with K. Y. Tsang),
Physica 11D
147, (1984).

``Invariant Distribution on Strange Attractors in Highly
Dissipative Systems,'' (with K. Tsang),
Phys. Lett.,
103A, 175 (1984).

``A Study of High Beta Ballooning Modes,'' (with H. D. Price,
N.M.P. Benjamin, B. K. Kang, and A. J. Lichtenberg),
Physics of Fluids 28,
392 (1985).

``A Theory of Modulational Diffusion'' (with B. V. Chirikov,
D. L. Shepelyanksy, and F. M. Vivaldi),
Physica 14D,
289 (1985).

``A Theoretical Study of ICRF Effects on Multiple Mirror
Confinement,'' (with K. J. Doniger and A. J. Lichtenberg),
Nuclear Fusion 25,
3 (1985).

``Transient Chaos in Dissipatively Perturbed, NearIntegrable
Hamiltonian Systems,'' (with K. Y. Tsang),
Phys. Rev. Lett.,
55, 908 (1985).

``Corrections to Quasilinear Diffusion in AreaPreserving
Maps,'' (with N. M. Murray and A. J. Lichtenberg),
Phys. Rev. A32,
2413 (1986).

``Measurement of a Curvature Driven, Trapped Particle Mode
Created by a Potential Barrier,'' (with J. C. Fernandez,
C. P. Chang, A. J. Lichtenberg, and H. Meuth),
Phys. Fluids
29, 1208 (1986).

``Transient Chaotic Distributions in Dissipative Systems,''
(with K. Y. Tsang)
Physica
21D, 401 (1986).

``Axial Plasma Injection and Shock Formation in Multiple
Mirrors,'' (with R. V. Bravenec and A. J. Lichtenberg),
Phys. Fluids
29, 1217 (1986).

``Velocity Diffusion in TwoFrequency Electron Cyclotron
Resonance Heating,'' (with A. J. Lichtenberg, J. E. Howard,
and R. Cohen),
Phys. Fluids
29, 1061 (1986).

``Four Dimensional Mapping Model for Two Frequency Electron
Cyclotron Heating,'' (with J. E. Howard, A. J. Lichtenberg,
and R. H. Cohen),
Physica
20D, 259 (1986).

``ManyDimensional Hamiltonian Systems,''
Physics of High Energy Particle Accelerators,
AIP Conference Proceedings, vol. 153, 631(1987).

``Experimental Observation of Stabilization of an Axisymmetric
Mirrors at High Beta with a Nearby Wall,'' (with R. A. Close,
B. K. Kang, A. J. Lichtenberg, and H. Meuth),
Phys. Fluids
29, 3892 (1986).

``Stochasticity and Resonances in the Two Beam Accelerator,''
(with N. W. Murray)
Proceedings of the Symposium on Advanced Accelerator Concepts,
American Institute of Physics, 1987.

``Observation of a Potential Barrier Created by Electron
Cyclotron Resonance Heating,'' (with C. P. Chang, H. Meuth,
and A. J. Lichtenberg),
Phys. Fluids
31, 123 (1988).

``The Effect of QuasiAccelerator Modes on Diffusion,''
(with A. J. Lichtenberg and N. W. Murray),
Physica
28D, 371 (1987).

``Axial Feedback Stabilization of Flute Modes for Mirror
Machines,'' (with B. K. Kang and A. Sen),
IEEE Trans. on Plasma Science
16, 22 (1988).

``Electron Beam TimeofFlight Potential Diagnostic,''
(with B. T. Archer and H. Meuth)
Rev. Sci. Instrum.
59, 128 (1988).

``Transient Electrostatic Potentials Driven by ShortPulse
Electron Cyclotron Heating,'' (with A. J. Lichtenberg and
R. H. Cohen)
Phys. Fluids
30, 3540 (1987).

``A Collisional Treatment of the Trapped Particle Mode in
MultiRegion Mirror Systems,'' (with H. Ramachandran,
A. J. Lichtenberg, and A. K. Sen)
Phys. Fluids
31, 2310 (1988).

``Radial Current Distribution at a Planar Magnetron Cathode,'' (with
A.E. Wendt and H. Meuth)
J. Vac. Sci. and Technol.
A6, 1827 (1988).

``Diffusion in Two Dimensional Mappings,'' (with A.J. Lichtenberg),
Physica D,
33, 211 (1988).

``Axial Distribution of Optical Emission in a Planar Magnetron
Discharge,'' (with Lan Gu),
J. Vac. Sci. and Technol. A
6, 2960 (1988).

``Analytical Solution for Capacitive R.F. Sheath,''
IEEE Trans. on Plasma Sci.
16, 638 (1988).

"SelfConsistent Stochastic Heating in Radio Frequency Discharges,"
(with C.G. Goedde and A.J. Lichtenberg),
J. Appl. Phys.
64, 4375 (1988).

"Macroscopic Modeling of RadioFrequency Plasma Discharges,"
(with G.R. Misium and A.J. Lichtenberg),
J. Vac. Sci. and Technol. A
7, 1007 (1989).

``A Method for Obtaining a Canonical Hamiltonian for Nonlinear LC
Circuits,'' (with G.M. Bernstein),
IEEE Trans. CAS
36, 411 (1989).

"Dynamics of a Collisional, Capacitive RF Sheath",
IEEE Trans. Plasma Sci.
17, 338 (1989).

"Spherical Shell Model of an Asymmetric RF Discharge",
J. Appl. Phys.
65, 4186 (1989).

``Nonlinear Dynamics of a Digital Phase Locked Loop,'' (with
G.M. Bernstein and A.J. Lichtenberg),
IEEE Transactions on Communications
vol. 37, no. 10, pp. 10621070 (1989).

"Cavity Perturbation Measurement of Plasma Density in Complex Geometry
RF Discharges" (with R.M. Moroney and A.J. Lichtenberg),
J. Appl. Phys.
66, 1618 (1989).

"Model of Plasma Immersion Ion Implantation",
J. Appl. Phys.
66, 2926 (1989).

"Secure Random Number Generation using Chaotic Circuits" (with G.M. Bernstein),
IEEE Transactions on Circuits and Systems
vol. 37, no. 9, pp. 11571164 (1990).

A.E. Wendt and M.A. Lieberman, "Spatial Structure of a Planar Magnetron
Discharge,"
Journal of Vacuum Science and Technology A
vol. 8, no. 2, pp. 902907, March/April 1990.

C.G. Goedde, A.J. Lichtenberg and M.A. Lieberman, "Parametric
Instabilities in the Discrete SineGordon Equation,"
Physica D
vol 41, pp. 341355, April 1990.

D.A. Carl, D.W. Hess and M.A. Lieberman, "Oxidation of Silicon in an
ECR Oxygen Plasma: Kinetics, PhysicoChemical and Electrical
Properties,"
Journal of Vacuum Science and Technology A
vol. 8, no. 3, pp. 29242930, May/June 1990.

M.A. Lieberman and S.E. Savas, "Bias Voltage in Finite Length,
Cylindrical and Coaxial RadioFrequency Discharges,"
Journal of Vacuum Science and Technology A
vol. 8, no. 3, pp. 16321641, May/June 1990.

D.A. Carl, D.W. Hess, and M.A. Lieberman, "Kinetics of Photoresist
Etching in an Electron Cyclotron Resonance Plasma,"
Journal of Applied Physics
vol 68, no. 4, p. 1859 (1990).

B.P. Wood, A.J. Lichtenberg and M.A. Lieberman, "Arnold Diffusion in
Weakly Coupled Standard Maps,"
Physical Review A
vol. 42, no. 10, pp. 58855893, November, 1990.

A.H. Sato and M.A. Lieberman, "Electron Beam Probe Measurements of
Electric Fields in RF Discharges,"
Journal of Applied Physics
vol. 68, no. 12, pp. 61176124, December, 1990.

M.V. Alves, M.A. Lieberman, V. Vahedi and C.K. Birdsall, "Sheath Voltage
Ratio for Asymmetric RF Discharges,"
Journal of Applied Physics
vol. 69, no. 7, pp. 38233829, April, 1991.
1990.

V. Vahedi, M.A. Lieberman, M.V. Alves, J.P. Verboncoeur and C.K.
Birdsall, "A One Dimensional Collisional Model for Plasma Immersion Ion
Implantation,"
Journal of Applied Physics
vol. 69, no. 4, pp. 20082014, February, 1991.

M.A. Lieberman, A.J. Lichtenberg and S.E. Savas, "Model of Magnetically
Enhanced, Capacitive RF Discharges,"
IEEE Transactions on Plasma Science
vol. 19, no. 2, pp. 189196, 1990.

D.A. Carl, M.C. Williamson, M.A. Lieberman, and A.J. Lichtenberg,
"Axial RF Electric Field Intensity and Ion Density during Low to High
Mode Transition in Argon Electron Cyclotron Resonance Discharges",
Journal of Vacuum Science and Technology B,
vol. 9, no. 2, pp. 339347, 1991.

B.P. Wood, M.A. Lieberman, and A.J. Lichtenberg, "Sheath Motion in a
Capacitively Coupled Radio Frequency Discharge",
IEEE Transactions on Plasma Science,
vol. 19, no. 4, pp. 619627, 1991.

X.Y. Qian, D. Carl, J. Benasso, N.W. Cheung, M.A. Lieberman, I.G.
Brown, J.E. Galvin, R.A. MacGill, and M.I. Current,
"A Plasma Immersion Ion Implantation Reactor for ULSI Fabrication,"
Nucl. Instr. Meth. Phys. Res. B
vol. 55, no. 14, pp. 884887, April, 1991.

X.Y. Qian, N.W. Cheung, M.A. Lieberman, R. Brennan, M.I. Current, and
N. Jha,
"Conformal Implantation for Trench Doping with Plasma Immersion Ion
Implantation,"
Nucl. Instr. Meth. Phys. Res. B
vol. 55, no. 14, pp. 898901, April, 1991.

X.Y. Qian, M.H. Kiang, J. Huang, D. Carl, N.W. Cheung, M.A. Lieberman,
I.G. Brown, K.M. Yu, and M.I. Current,
"Plasma Immersion Pd Ion Implantation Seeding Pattern Formation for
Selective Electroless Cu Plating,"
Nucl. Instr. Meth. Phys. Res. B
vol. 55, no. 14, pp. 888892, April, 1991.

X.Y. Qian, N.W. Cheung, M.A. Lieberman, M.I. Current, P.K. Chu, W.L.
Harrington, C.W. Magee, and E. M. Botnick,
"Sub100 nm P+/N Junction Formation Using Plasma Immersion Ion
Implantation,"
Nucl. Instr. Meth. Phys. Res. B
vol. 55, no. 14, pp. 821825, April, 1991.

X.Y. Qian, N.W. Cheung, M.A. Lieberman, S.B. Felch, R. Brennen, and
M.I. Current, "Plasma Immersion Ion Implantation of SiF4 and BF3 for
Sub100 nm P+/N Junction Fabrication,"
Applied Physics Letters
vol. 59, no. 3, pp. 348350, 1991.

M. de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman,
"Nonlinear Dynamics of SelfSynchronizing Systems,"
International Journal of Bifurcation and Chaos,
vol. 1, no. 3, pp. 691699, September, 1991.

D.A. Carl, D.W. Hess, M.A. Lieberman, T.D. Nguyen, and R. Gronsky,
"Effects of DC Bias on the Kinetics and Electrical Properties of
Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma,"
J. Appl. Phys.,
vol. 70, no. 6, pp. 33013313,
September, 1991.

R.A. Stewart and M.A. Lieberman,
"Model of Plasma Immersion Ion Implantation for Voltage Pulses with
Finite Rise and FallTimes,"
J. Appl. Phys.,
vol. 70, pp. 34813487,
October, 1991.

C.G. Goedde, A.J. Lichtenberg, and M.A. Lieberman, "Chaos and the
Approach to Equilibrium in the Discrete SineGordon Equation",
Physica D,
vol. 59, no. 13, pp. 200225, Oct. 1, 1992.

M.H. Kiang, M.A. Lieberman, N.W. Cheung and X.Y. Qian, "Pd/Si Plasma
Immersion Ion Implantation for Selective Electroless Copper Plating on
SiO2,"
Applied Physics Letters
vol. 60, no. 22, pp. 27672769, June, 1992.

C.A. Pico, M.A. Lieberman and N.W. Cheung, "PMOS Integrated Circuit
Fabrication using BF3 Plasma Immersion Ion Implantation,"
Journal of Electronic Materials
vol. 21, no. 1, pp. 7579, January, 1992.

R.J. Lynch, S. Das, M.A. Lieberman and D.W. Hess, "Electron Cyclotron
Resonance Etching of Silylated Resist,"
Proceedings SPIE  Advances in Resist Technology and Processing IX
Vol. 1672, pp. 429440, 910 March 1992.

M.H. Kiang, C.A. Pico, M.A. Lieberman, N.W. Cheung, X.Y. Qian, and
K.M. Yu
"Selective Copper Plating in Silicon Dioxide Trenches with Metal
Plasma Immersion Ion Implantation,"
Materials Research Society Symposium Proceedings
vol. 223, pp. 377383, 1991.

C.A. Pico, X.Y. Qian, E. Jones, M.A. Lieberman and N.W. Cheung,
"Shallow P+/N Junction Fabrication by Plasma Immersion Ion
Implantation,"
Materials Research Society Symposium Proceedings
vol. 223, pp. 115119, 1991.

M. de SousaVieira, P. Khoury, A.J. Lichtenberg, M.A. Lieberman, W.
Wonchoba, J. Gullicksen, J. Huang, R. Sherman and M. Steinberg,
"Numerical and Experimental Studies of SelfSynchronization and
Synchronized Chaos,"
International Journal of Bifurcation and Chaos
vol. 2, no. 3, 645657, 1993.

M.C. Williamson, A.J. Lichtenberg and M.A. Lieberman,
"SelfConsistent Electron Cyclotron Resonance Absorption in a Plasma
with Varying Parameters,"
Journal of Applied Physics
vol. 72, no. 9, pp. 39243933, Nov. 1 1992.

Maria de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman,
"Synchronization of Regular and Chaotic Systems,"
Physical Review A
vol. 46, no. 12, pp. R7359R7362, Dec. 15, 1992.

V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso and T.D. Rognlien,
"Verification of Frequency Scaling Laws for Capacitive RadioFrequency
Discharges using TwoDimensional Simulations,"
Physics of Fluids B
vol. 5, no. 7, pp. 27192729, July 1993.

V. Vahedi, R.A. Stewart, and M.A. Lieberman
"Analytic Model of the Ion Angular Distribution in a Collisional
Sheath,"
Journal of Vacuum Science and Technology A
vol. 11, no. 4, pp. 12751282, JulyAug. 1993.

V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso, and T.D.
Rognlien, ``Capacitive RF Discharges Modeled by ParticleInCell
MonteCarlo Simulation: I. Analysis of Numerical Techniques,''
Plasma Sources Science and Technology,
vol. 2, pp. 261272, December, 1993.

V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso, and T.D.
Rognlien, ``Capacitive RF Discharges Modeled by ParticleInCell
MonteCarlo Simulation: II. Comparisons with Laboratory Measurements
of Electron Energy Distribution Functions,''
Plasma Sources Science and Technology,
vol. 2, pp. 273278, December, 1993.

B.P. Wood, A.J. Lichtenberg, and M.A. Lieberman
"Arnold and Arnoldlike Diffusion in Many Dimensions,"
Physica D,
vol. 71, no. 12, pp. 132145, 1994.

A.J. Lichtenberg, V. Vahedi, M.A. Lieberman, and T. Rognlien,
"Modeling Electronegative Plasma Discharges,"
Journal of Applied Physics,
vol. 75, no. 5, pp. 23392347, March 1994; vol. 76, no. 1, p. 625, July 1994.

C. Lee, D.B. Graves, M.A. Lieberman, and D.W. Hess,
"Global Model of Plasma Chemistry in a High Density Oxygen Discharge,"
J. Electrochemical Society,
vol. 141, no. 6, pp. 15461555, June 1994.

K.M. Kalpakjian, M.A. Lieberman, and W.G. Oldham,
"Frequency Effects in the Reactive Ion Etching of Silylated
Photoresist,"
Journal of Vacuum Science and Technology B,
vol. 12, no. 3, pp. 13511361, May/June 1994.

W.E. Wonchoba, M.A. Lieberman, and A.J. Lichtenberg,
"The Dynamics of a Class of Coupled Digital Oscillators,"
Nonlinearity,
vol. 7, pp. 16951715, December, 1994.

Maria de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman,
"Nonlinear Dynamics of Digital PhaseLocked Loops with Delay,"
International Journal of Bifurcation and Chaos
vol. 4, no. 3, pp. 715726, 1994.

M. de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman,
"SelfSynchronization of Many Coupled Oscillators,"
International Journal of Bifurcation and Chaos
vol. 4, no. 6, pp. 15631577, 1994.

K. Niazi, A.J. Lichtenberg, M.A. Lieberman, and D.L. Flamm,
"Operation of a Helical Resonator Source,"
Plasma Sources Science and Technology
vol. 3, pp. 482495, 1994.

M.A. Lieberman and R.A. Gottscho,
"Design of High Density Plasma Sources for Materials Processing,"
Physics of Thin Films,
vol. 18,
ed. by M. Francombe and J. Vossen, Academic Press, New York,
pp. 1119, September 1994.

M.A. Lieberman and A.J. Lichtenberg,
Principles of Plasma Discharges and Materials Processing,
John Wiley and Sons, New York, October 21, 1994, 572 pages.

J. De Luca, A.J. Lichtenberg, and M.A. Lieberman,
"Time Scale to Ergodicity in the FermiPastaUlam System,"
CHAOS,
vol. 5, no. 1, pp. 283297, 1995.

Min Young Cho, A.J. Lichtenberg, and M.A. Lieberman,
"Minimum Stopping Distance for Linear Control of an Automatic
CarFollowing System,"
IEEE Transactions on Vehicular Technology,
vol. 45, no. 2, pp. 383390, May, 1996.

Sumio Ashida, M.A. Lieberman, and C. Lee,
"Spatially Averaged (Global) Model of Time Modulated High Density
Argon Plasmas,"
Journal of Vacuum Science and Technology A,
vol. 13, no. 5, pp. 24982507, Sep/Oct 1995.

C. Lee and M.A. Lieberman,
"Global Model of Ar, O2, Cl2, and Ar/O2 High Density Plasma
Discharges,"
Journal of Vacuum Science and Technology A,
vol. 13, no. 2, pp. 368380, Mar/Apr 1995.

P.N. Wainman, M.A. Lieberman, A.J. Lichtenberg, R.A. Stewart, and C.
Lee,
"Characterization at Different Aspect Ratios (Radius/Length) of a
Radio Frequency Inductively Coupled Plasma Source,"
Journal of Vacuum Science and Technology A,
vol. 13, no. 5, pp. 24642469, Sept/Oct 1995.

V. Vahedi, M.A. Lieberman, G. DiPeso, T.D. Rognlien, and D. Hewett,
"Analytic Model of Power Deposition in Inductively Coupled Plasma
Sources,"
Journal of Applied Physics,
vol. 78, no. 3, pp. 14461458, August 1, 1995.

W. En, M.A. Lieberman, and N.W. Cheung, "Comparison of Experimental
Target Currents with Analytical Model results for Plasma Immersion Ion
Implantation,"
IEEE Transactions on Plasma Science,
vol. 23, no. 3, pp. 415421, June, 1995.

B.P. Wood, A.J. Lichtenberg, and M.A. Lieberman
"Stochastic Electron Heating in a Capacitive RF Discharge with
NonMaxwellian and TimeVarying Distributions",
IEEE Transactions on Plasma Science,
vol. 23, no. 1, pp. 8996, Feb 1995.

C. Lee, M.A. Lieberman, and D.B. Graves, "Sensitivity Analysis of
Plasma Chemistry for High Density Discharges,"
Conference Proceedings of the Electrochemical Society,
195th Annual Meeting, San Francisco, CA, May 2227, 1994, 10 pages.

C. Lee, M.A. Lieberman, and D.B. Graves,
"Role of Etch Products in Polysilicon Etching in a High Density
Chlorine Discharge,"
Plasma Chemistry and Plasma Processing,
vol. 16, no. 1, pp. 99120, 1996.

K. Niazi, A.J. Lichtenberg, and M.A. Lieberman,
"The Dispersion and Matching Characteristics of the Helical Resonator
Plasma Source",
IEEE Transactions on Plasma Science,
vol. 23, no. 5, pp. 833843, October 1995.

S. Ashida, M.R. Shim, and M.A. Lieberman,
"Measurements of PulsedPower Modulated Argon Plasmas in an Inductively
Coupled Plasma Source",
Journal of Vacuum Science and Technology A,
vol. 14, no. 2, pp. 391397, Mar/Apr 1996.

M.A. Lieberman and S. Ashida,
"Global Models of PulsePower Modulated High Density, Low Pressure
Discharges,"
Plasma Sources Science and Technology,
vol. 5, pp. 145158, May, 1996.

I. Kouznetsov, A.J. Lichtenberg, and M.A. Lieberman,
"Modeling Electronegative Discharges at Low Pressure,"
Plasma Sources Science and Technology,
vol. 5, no. 4, pp. 662676, November 1996.

P. Khoury, M.A. Lieberman, and A.J. Lichtenberg,
"Degree of Synchronization of Noisy Maps on the Circle,"
Physical Review E,
vol. 54, pp. 33773388, October 1996.

Y.T. Lee, M.A. Lieberman, A.J. Lichtenberg, F. Bose, H. Baltes, and R.
Patrick,
"Global Model for High Pressure Electronegative RadioFrequency
Discharges,"
Journal of Vacuum Science and Technology A,
vol. 15, no. 1, pp. 113126, Jan/Feb 1997.

M.A. Lieberman, G.S. Selwyn, and M. Tuszewski, "Plasma Generation for
Materials Processing,"
MRS Bulletin,
vol. 21, no. 8, pp. 3237, Aug 1996.

H.A. Tanaka, M.D.S. Vieira, A.J. Lichtenberg, M.A. Lieberman, and
S. Oishi,
"Stability of Synchronization States in One Dimensional Networks of
Second Order PLLs,"
International Journal of Bifurcation and Chaos,
vol. 7, no. 3, pp681690, March 1997.

S. Ashida and M.A. Lieberman
"Spatially Averaged (Global) Model of Time Modulated High Density
Chlorine Plasmas,"
Japanese Journal of Applied Physics,
vol. 36, no. 2, pp. 854861, February 1997.

A.J. Lichtenberg, I.G. Kouznetsov, Y.T. Lee, M.A. Lieberman, I.D.
Kaganovich, and L.D. Tsendin,
"Modelling Plasma Discharges at High Electronegativity",
Plasma Sources Science and Technology
vol. 6, no. 3, pp. 437449, August, 1997.

J.T. Gudmundsson and M.A. Lieberman,
"Magnetic Induction and Plasma Impedance in a Cylindrical
Inductive Discharge,"
Plasma Sources Science and Technology,
vol. 6, no. 4, pp. 540550, November 1997.

J.T. Gudmundsson and M.A. Lieberman,
"Model and Measurements for a Planar Inductive Oxygen Discharge",
Plasma Sources Science and Technology,
vol. 7, no. 1, pp. 112, February, 1998.

Yaoxi Wu and M.A. Lieberman,
"A Travelling Wave Driven, Inductively Coupled Large Area Plasma
Source",
Applied Physics Letters,
vol. 72, no. 7, pp. 777779, 16 February 1998.

P. Khoury, M.A. Lieberman, and A.J. Lichtenberg
"Experimental Measurement of the Degree of Chaotic Synchronization
Using a Distribution Exponent",
Physical Review E,
vol. 57, no. 5, pp. 54485466, May, 1998.

M.A. Lieberman and V.A. Godyak,
"From Fermi Acceleration to Collisionless Discharge Heating",
IEEE Transactions on Plasma Sciences,
vol. 26, no. 3, pp. 955986, June, 1998.

M.A. Lieberman,
"The Dynamics of Fermi Acceleration," in
Electron Kinetics and Applications of Glow Discharges,
ed. by U. Kortshagen and L.D. Tsendin,
NATO ASI Series B, vol. 367, pp. 215225, 1998.

M.A. Lieberman and R.W. Boswell,
"Modeling the Transitions from Capacitive to Inductive to
WaveSustained RF Discharges,"
J. Phys. IV France
vol. 8, no. Pr7, pp. 145164, October, 1998.

J.T. Gudmundsson, T. Kimura, and M.A. Lieberman
"Experimental Studies of O2/Ar Plasma in a Planar Inductive
Discharge",
Plasma Sources Science and Technology,
vol. 8, pp. 2230, January, 1999.

C.F. Yeh, T.J. Chen, C. Liu, J.T. Gudmundsson, and M.A. Lieberman,
"Hydrogenation of Polysilicon Thin Film Transistor in a Planar
Inductive H2/Ar Discharge",
IEEE Electron Devices Letters,
vol. 20, no. 5, pp. 223225, May 1999.

M.M. Turner and M.A. Lieberman, "Hysteresis and the E to H Transition
in Radiofrequency Inductive Discharges,"
Plasma Sources Science and Technology,
vol. 8, pages 313324, June 1999.

Emi Kawamura, V. Vahedi, M.A. Lieberman, and C.K. Birdsall
"Ion Energy Distributions in RF Sheaths; Review, Analysis, and
Simulation",
Plasma Sources Science and Technology,
vol. 8, no. 3, pp. R45R64, August 1999.

I.G. Kouznetsov, A.J. Lichtenberg, and M.A. Lieberman
"Internal Sheaths in Electronegative Discharges",
Journal of Applied Physics,
vol. 86, no. 3, pp. 41424153, October 15, 1999.

M.A. Lieberman, A.J. Lichtenberg, and A.M. Marakhtanov,
"Instabilities in Low Pressure Inductive Discharges with Attaching
Gases,"
Applied Physics Letters
vol. 75, no. 23, pp. 36173619, 6 December 1999.

M.A. Lieberman, "Plasma Discharges for Materials Processing and
Display Applications," in
Advanced Technologies Based on Wave and Beam Generated Plasmas,
ed. by H. Schluter and A. Shivarova,
NATO Science Series 3: High Technology, vol. 67, pp. 122, 1999.

A.J. Lichtenberg, M.A. Lieberman, I.G. Kouznetsov, and T.H. Chung,
"Transitions and Scaling Laws for Electronegative Discharge
Models,"
Plasma Sources Science and Technology,
vol. 9, no. 1, pp. 4556, February 2000.

M.A. Lieberman,
"Fundamentals of Plasmas and Sheaths", Chapter 2 in
Handbook of Plasma Immersion Ion Implantation and Deposition,
Andre Anders, editor, John Wiley and Sons, New York, 2000.

Yaoxi Wu and M.A. Lieberman,
"The Influence of Antenna Configuration and Standing Wave Effects on
Density Profile in a Large Area Inductive Plasma Source,"
Plasma Sources Science and Technology,
vol. 9, no. 2, pp. 210218, May 2000.

J.T. Gudmundsson, A.M. Marakhtanov, K.K. Patel, V.P. Gopinath, and M.A.
Lieberman, "On the Plasma Parameters of a Planar Inductive Oxygen
Discharge,"
J. Phys. D: Applied Physics,
vol. 33, no. 11, pp. 13231331, 7 June 2000.

A.J. Lichtenberg and M.A. Lieberman, "Modeling a MetalVapor
BufferGas Hollow Cathode Discharge,"
Journal of Applied Physics,
vol. 87, no. 10, pp. 71917197, May 15, 2000.

C. Charles, A.W. Degeling, T.E. Sheridan, J.H. Harris, M.A.
Lieberman, and R.W. Boswell, "Absolute Measurements of Radiofrequency
Fields Using a Retarding Field Energy Analyzer,"
The Physics of Plasmas,
vol.7, no. 12, pp. 52324, Dec. 2000.

G. Gozadinos, D. Vender, M.M. Turner, and M.A. Lieberman,
"Collisionless Electron Heating by Capacitive Radio Frequency
Sheaths,"
Plasma Sources Science and Technology,
vol. 10, no. 2, pp. 117124, May 2001.

J. T. Gudmundsson, A. M. Marakhtanov, K. K. Patel, V. P. Gopinath and
M. A. Lieberman, A reply to a comment on: "On the Plasma Parameters of a
Planar Inductive Oxygen Discharge",
Journal of Physics D: Applied Physics,
vol. 33, pp. 30103012 (2000)

K.L. Scott, T.J. King, M.A. Lieberman and K.N. Leung,
"Pattern Generators and Microcolumns for Ion Beam Lithography,"
J. Vac. Sci. Technol. B
vol. 18, no. 6, pp. 31723176, Nov/Dec 2000.

K. Takechi and M.A. Lieberman,
"Photoresist Etching in an Inductively Coupled, Traveling Wave
Driven, Large Area Plasma Source,"
Journal of Applied Physics,
vol. 89, no. 2, pp. 869877, January 15, 2001.

J.T. Gudmundsson, I.G. Kouznetsov, K.K. Patel, and M.A. Lieberman,
"Electronegativity of Low Pressure High Density Oxygen
Discharges,"
Journal of Physics D: Applied Physics
vol. 34, pp. 11001109 (March 2001).

P. Chabert, A.J. Lichtenberg, M.A. Lieberman and A.M. Marakhtanov,
"Instabilities in LowPressure Electronegative Inductive
Discharges,"
Plasma Sources Science and Technology,
vol. 10, pp. 478489, 2001.

K. Takechi and M.A. Lieberman,
Effect of Ion Energy on Photoresist Etching in an Inductively
Coupled, Traveling Wave Driven, Large Area Plasma Source,"
Journal of Applied Physics,
vol. 89, no. 10, pp. 53185321, 15 May 2001.

T. Kimura, A.J. Lichtenberg, and M.A. Lieberman,
"Modeling Two Dimensional Electronegative Discharges,"
Plasma Sources Science and Technology,
vol. 10, pp. 430439, 2001.

K. Takechi and M.A. Lieberman,
"Effect of Argon Addition to an O2 Plasma in an Inductively
Coupled, Traveling Wave Driven, Large Area Plasma Source: O2/Ar
Mixture Plasma Modeling and Photoresist Etching"
Journal of Applied Physics,
vol. 90, no. 7, pp. 32053211, October 2001.

M.A. Lieberman, J.P. Booth, P. Chabert, J.M. Rax, and M.M. Turner,
"Standing Wave and Skin Effects in Large Area, High Frequency, Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 11, no. 3, pp. 283293, August 2002.

Suwon Cho and M.A. Lieberman, "Local and Global Particle and
Power Balance in Large Area Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 12, no. 2, pp. 244254, May 2003.

Suwon Cho and M.A. Lieberman, "SelfConsistent Discharge
Characteristics of Collisional Helicon Plasmas,"
Physics of Plasmas,
vol. 10, no. 3, pp. 882890, March 2003.

P. Chabert, H. Abada, J.P. Booth, and M.A. Lieberman,
"Radical Dynamics in Unstable CF4 Inductive Discharges,"
Journal of Applied Physics,
vol. 94, no. 1, pp. 7684, July 2003.

P. Chabert, A.J. Lichtenberg, M.A. Lieberman, and A.M.
Marakhtanov, "Dynamics of Steady and Unsteady Operation of
Inductive Discharges with Attaching Gases,"
Journal of Applied Physics,
vol. 94, no. 2, pp. 831843, July 2003.

C. Charles, R.W. Boswell, and M.A. Lieberman,
"Energy Balance in a Low Pressure Capacitive Discharge
Driven by a DoubleSaddle Antenna,"
Physics of Plasmas,
vol. 10, no. 3, pp. 891899, April 2003.

A.M. Marakhtanov, M. Tuszewski, M.A. Lieberman, A.J. Lichtenberg, and P.
Chabert, "Stable and Unstable Behavior of Inductively Coupled Electronegative
Discharges,"
Journal of Vacuum Science and Technology,
vol. A21, no. 6, pp. 184964, Nov/Dec 2003.

M.A. Lieberman, "The Dynamics of Fermi Acceleration: From Cosmic Rays to
Discharge Heating," Chapter 3 in Nonlinear Dynamics: From Lasers to
Butterflies, ed. by R. Ball, World Scientific, Singapore, pp. 115164,
2003.

P. Chabert, J.L. Raimbault, J.M. Rax, and M.A. Lieberman,
"SelfConsistent Nonlinear Transmission Line Model of
Standing Wave Effects in a Capacitive Discharge,"
Physics of Plasmas,
vol. 11, no. 5, pp. 177585, May 2004.

M.A. Lieberman and A.J. Lichtenberg,
Principles of Plasma Discharges and Materials Processing,
Second Edition, John Wiley and Sons, New York, April, 2005, 757 pages.

P. Chabert, J.L. Raimbault, P. Levif, J.M. Rax, and M.A. Lieberman,
"Inductive Heating and E to H Transitions in Capacitive Discharges,"
Physical Review Letters,
vol. 95, no. 20, pp. 20500104, 11 November 2005.

A. Aanesland, C. Charles, R.W. Boswell, and M.A. Lieberman,
"Grounded RadioFrequency Electrodes in Contact with High Density Plasmas,"
Physics of Plasmas,
vol. 12, pp. 1350511, November 2005.

M.A. Lieberman, A.J. Lichtenberg, Sungjin Kim, J.T. Gudmundsson, D.L.
Keil, and Jisoo Kim,
"Plasma Ignition in a Grounded Chamber Connected to a Capacitive
Discharge,"
Plasma Sources: Science and Technology
vol. 15, pp. 276287, March 2006.

P. Chabert, J.L. Raimbault, P. Levif, J.M. Rax, and M.A. Lieberman,
"Inductive Heating and E to H Transitions in High Frequency
Capacitive Discharges,"
Plasma Sources: Science and Technology
vol. 15, pp. S130S136, April 2006.

M.A. Lieberman and C. Charles,
"A Theory For Formation of a Low Pressure, CurrentFree Double Layer,"
Physical Review Letters,
vol. 97, no. 4, pp. 045003, 28 July 2006.

Sungjin Kim, M.A. Lieberman, A.J. Lichtenberg, and J.T. Gudmundsson,
"Improved VolumeAveraged Model for Steady and PulsedPower
Electronegative Discharges,"
Journal of Vacuum Science and Technology A,
vol. 24, pp. 20252040, Nov/Dec 2006.

M.A. Lieberman, C. Charles, and R.W. Boswell,
"A Theory for Formation of a Low Pressure, CurrentFree Double Layer,"
Journal of Physics D: Applied Physics,
vol. 39, pp. 32943304, July 2006.

Emi Kawamura, M.A. Lieberman, and A.J. Lichtenberg,
"Stochastic Heating in Single and Dual Frequency Capacitive
Discharges,"
Physics of Plasmas,
vol. 13, p. 053506 114, May 2006.

Sungjin Kim, Zhuwen Zhou, M.A. Lieberman, and A.J. Lichtenberg,
"Relaxation Oscillations in a Capacitive Discharge Chamber Connnected
to a Peripheral Grounded Chamber,"
Journal of Applied Physics,
vol. 100, pp. 10330219, Nov. 2006.

Zhuwen Zhou, M.A. Lieberman, and Sungjin Kim,
"Instability Parameters of Optical Oscillation Frequency in Plasma Central
Discharge and Periphery Region,"
Chinese Physics Letters,
vol. 23, pp. 22512254, 2006.

P. Chabert, P. Levif, J.L. Raimbault, J.M. Rax, M.M. Turner, and M.A.
Lieberman,
"Electron Heating in MultipleFrequency Capacitive Discharges,"
Plasma Physics and Controlled Fusion,
vol. 48, pp. B2321B237, November 2006.

A. Aanesland, C. Charles, M.A. Lieberman, and R.W. Boswell,
"Upstream Ionization Instability Associated with a CurrentFree Double Layer,"
Physical Review Letters,
vol. 97, pp. 750036, August 18, 2006.

A. Aanesland, M.A. Lieberman, C. Charles, and R.W. Boswell,
"Experiments and Theory of an Upstream Ionization Instability Excited by an
Accelerated Electron Beam Through a CurrentFree Double Layer,"
The Physics of Plasmas,
vol. 13, pp. 122101110, 2006.

C. Charles, R.W. Boswell, and M.A. Lieberman,
"Xenon Ion Beam Characterization in a Helicon Double Layer Thruster,"
Applied Physics Letters,
vol. 89, pp. 2615035, 2006.

Alan Wu, M.A. Lieberman, and J.P. Verboncoeur,
"A Model for Computing Ion Energy Distributions in MultiFrequency Capacitive
Discharges,"
Journal of Applied Physics,
vol. 101, pp. 0561057, 2007.

ZhuWen Zhou, M.A. Lieberman, and Sungjin Kim,
"Review of Relaxation Oscillations in Plasma Processing Discharges,"
Chinese Physics,
vol. 16, pp. 758765, March 2007.

E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and E.A. Hudson,
"Capacitive Discharges Driven by Combined DC/RF Sources,"
Journal of Vacuum Science and Technology A,
vol. 25, pp. 14561474, Sep/Oct 2007.

P. Chabert, A.J. Lichtenberg, and M.A. Lieberman,
"Theory of a DoubleLayer in an Expanding Electronegative Plasma,"
The Physics of Plasmas,
vol. 14, pp. 0935021/11, Sep 2007.

Insook Lee, D.B. Graves, and M.A. Lieberman
"Modeling Electromagnetic Effects in Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 17, p. 015018 (16pp), Feb. 2008.

M.A. Lieberman, A.J. Lichtenberg, E. Kawamura, Thomas Mussenbrock, and
Ralf Peter Brinkmann,
"The Effects of Nonlinear Series Resonance on Ohmic and Stochastic
Heating in Capacitive Discharges,"
Physics of Plasmas,
vol. 15, pp. 061505/19, June 2008.

E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman
"Secondary Electrons in RF and DC/RF Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 17, 045002 (11pp), 2008.

M.A. Lieberman,
"The Langmuir Isotherm and the Standard Model of IonAssisted
Etching,"
Plasma Sources Science and Technology,
vol. 18, 014002 (5pp), 2009.

T. Mussenbrock, R.P. Brinkmann, M.A. Lieberman, A.J. Lichtenberg, and
E. Kawamura, "Enhancement of Ohmic and Stochastic Heating by Resonance
Effects in Capacitive RadioFrequency Discharges: A Theoretical
Approach,"
Physical Review Letters,
vol. 101, 085004 (4pp), 2008.

G. Leray, P. Chabert, A.J. Lichtenberg and M.A. Lieberman,
"Fluid Model of an Electronegative Discharge with Magnetized
Electrons and Unmagnetized Ions,"
Journal of Physics D: Applied Physics,
vol. 42, 194020, October 2009.

E. Kawamura, A.J. Lichtenberg and M.A. Lieberman,
"Double Layer Formation in a TwoRegion Electronegative Plasma,"
Physics of Plasmas,
vol. 16, 122114, December 2009.

K. Takahashi, C. Charles, R. Boswell, M.A. Lieberman, and R.
Hatakeyama,
"Characterization of the Temperature of Free Electrons Diffusing from
a Magnetically Expanding CurrentFree Double Layer Plasma,"
Journal of Physics D: Applied Physics,
vol. 43, 162001, April 2010.

E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman,
"Waves in expanding electronegative plasmas containing double layers,"
Journal of Applied Physics,
vol. 107, 123301, June 15 2010.

M.A. Lieberman and A.J. Lichtenberg,
"Electron heating of voltagedriven and matched dual frequency
discharges,"
Plasma Sources Science and Technology,
vol. 19, 065006, December 2010.

E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman,
"Twodimensional particleincell simulations of transport in a
magnetized electronegative plasma,"
Journal of Applied Physics,
vol. 108, 103305, November 15 2010.

Qing Li, YiKang Pu, M.A. Lieberman, and D.J. Economou, "Dynamic Model
of Streamer Coupling for Homogeneity of Glowlike Dielectric Barrier
Discharges,"
Physical Review E,
vol. 83, 046405, April 2011.

E. Kawamura, D.B. Graves, and M.A. Lieberman, "Fast 2D Hybrid
FluidAnalytical Simulation of Inductive/Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 20, 035009, June 2011.

J.T. Gudmundsson and M.A. Lieberman, "On the Ar+ and Xe+ Velocities
Near the PresheathSheath Boundary in a Ar/Xe Discharge,"
Physical Review Letters,
volume 107, 045002, July 2011.

Ying Wang, M.A. Lieberman, Alan Wu, and J.P. Verboncoeur,
"Verification of Collisionless Sheath Model of Capacitive RF
Discharges by ParticleinCell Simulations,"
Journal of Applied Physics,
volume 110, 033307, August 2011.

C. Lazzaroni, P. Chabert, M.A. Lieberman, A.J. Lichtenberg, and A. Leblanc,
"Analyticalnumerical global model of atmosphericpressure radiofrequency capacitive discharges,"
Plasma Sources Science and Technology
volume 21, 035013 (2012)

E. Kawamura, A.J. Lichtenberg and M.A. Lieberman,
"Electronegative plasma equilibria with spatially varying ionization",
Journal of Physics D: Applied Physics
volume 45, 495204 (2012).

E. Kawamura, M.A. Lieberman, A.J. Lichtenberg and D.B. Graves,
"Twodimensional simulation of inductivecapacitive transition instability in an electronegative plasma",
Plasma Sources Science and Technology,
volume 21, 045014 (2012).

C. Lazzaroni, M.A. Lieberman, A.J. Lichtenberg and P. Chabert,
"Comparison of a hybrid model to a global model of atmospheric pressure radiofrequency discharges",
Journal of Physics D: Applied Physics
volume 45, 495204 (2012)

J.T. Gudmundsson, E. Kawamura, and M.A. Lieberman,
"A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particleincell Monte Carlo code,"
Plasma Sources Science and Technology
volume 22, 035011 (2013)

E. Kawamura, M.A. Lieberman, and A.J. Lichtenberg,
"Narrow gap electronegative capacitive discharges,"
Physics of Plasmas
volume 20, 101603 (2013)

A. Leblanc, Ke Ding, M.A. Lieberman, De Xin Wang, Jing Zhang and Jian
Jun Shi, "Hybrid model of atmospheric pressure Ar/O2/TiCl4 capacitive
discharge for TiO2 deposition,"
Journal of Applied Physics,
vol. 115, 183302, May 2014.

E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, P. Chabert and C.
Lazzaroni, "Particleincell and global simulations of alpha to gamma
transition in atmospheric pressure Penningdominated capacitive
discharges,"
Plasma Sources Science and Technology,
vol. 23, 035014, June 2014.

Ke Ding, M.A. Lieberman and A.J. Lichtenberg, "Hybrid model of neutral
diffusion, sheaths, and the alpha to gamma transition in an atmospheric
pressure He/H2O bounded rf discharge,"
Journal of Physics D,
vol. 47, 305203, July 2014.

E. Kawamura, M.A. Lieberman and D.B. Graves, "Fast 2D FluidAnalytical
Simulation of Ion Energy Distributions and Electromagnetic Effects in
MultiFrequency Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 23, 064003 (2014).

Ke Ding, M.A. Lieberman, A.J. Lichtenberg, Jian Jun Shi, and Jing
Zhang, "Comparison of a Hybrid Model with Experiments in Atmospheric
Pressure Helium and Argon Capacitive RF Discharges,"
Plasma Sources Science and Technology,
vol. 23, 065048 (2014).

E. Kawamura, M.A. Lieberman, and A.J. Lichtenberg, "Electron Heating
in Low Pressure Capacitive Discharges Revisited,"
Physics of Plasmas,
vol. 21, 123505 (2014).

Ke Ding and M.A. Lieberman, "Reaction Pathways for BioActive Species
in a He/H2O Atmospheric Pressure Capacitive Discharge,"
Journal of Physics D: Applied Physics,
vol. 48, 035401 (2015).

M.A. Lieberman, "Analytical Model of Atmospheric Pressure,
Helium/Trace Gas RadioFrequency Capacitive Penning Discharges,"
Plasma Sources Science and Technology,
vol. 25, 025009 (2015).

J.T. Gudmundsson and M.A. Lieberman, "On the Role of Metastables in
Capacitively Coupled Oxygen Discharges,"
Plasma Sources Science and Technology,
vol. 24, 035016 (May 2015).

M.A. Lieberman, A.J. Lichtenberg, E. Kawamura, and A.M. Marakhtanov,
"Nonlinear Standing Wave Excitation by Series ResonanceEnhanced
Harmonics in Low Pressure Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 24, 055011 (August 2015).

M.A. Lieberman, A.J. Lichtenberg, E. Kawamura and P. Chabert,
"Linear Electromagnetic Excitation of an Asymmetric Low Pressure
Capacitive Discharge with Two Unequal Sheath Widths,"
Physics of Plasmas,
vol. 23, 013501, 2016.

E. Kawamura, A.J. Lichtenberg, M.A. Lieberman and A. Marakhtanov,
"2D FluidAnalytical Simulation of Electromagnetic Effects in Low
Pressure, High Frequency Electronegative Capacitive Discharges,"
Plasma Sources Science and Technology,
vol. 25, 035007, 2016.

DeQi Wen, Wei Liu, Fei Gao, M.A. Lieberman and YouNian Wang,
"A Hybrid Model of Radio Frequency Biased Inductively Coupled Plasma
Discharges: Description of Model and Experimental Validation in
Argon,"
Plasma Sources Sci. Technol.
vol. 25, 045009 (June 2016).

R. Gopalakrishnan, E. Kawamura, A.J. Lichtenberg, M.A. Lieberman and
D.B. Graves,
"Solvated Electrons at the Atmospheric Pressure PlasmaWater Anodic
Interface,"
J.Phys. D: Appl. Phys.
vol. 49, 295205, June 2016.

E. Kawamura, M.A. Lieberman and A.J. Lichtenberg,
"Standing Striations Due to Ionization Instability in Atmospheric
Pressure He/H2O Radio Frequency Capacitive Discharges,"
Plasma Sources Sci. Technol.
vol. 25, 054009, September 2016.

A. Tavant and M.A. Lieberman,
"Hybrid Global Model of Water Cluster Ions in Atmospheric Pressure
Ar/H2O RF Capacitive Discharges,"
J. Phys. D: Appl. Phys.
November 2016.

DeQi Wen, YuRu Zhang, M.A. Lieberman and YouNian Wang,
"Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O2
Discharges by using a Hybrid Model,"
Plasma Processes and Polymers
vol. 14, 1600100, July 2016.

DeQi Wen, E. Kawamura, M.A. Lieberman, A.J. Lichtenberg and YouNian Wang,
"Nonlinear series resonance and standing waves in dualfrequency
capacitive discharges,"
Plasma Sources Sci. Technol.
vol. 26, 015007, November 2016.

E. Kawamura, M.A. Lieberman and A.J. Lichtenberg,
"Ionization Instability Induced Striations in Atmospheric Pressure
He/H2O RF and DC Discharges,"
J. Phys. D: Appl. Phys.
vol. 50, 145204, March 2017.

E. Kawamura, DeQi Wen, M.A. Lieberman, and A.J. Lichtenberg,
"Effect of a dielectric layer on plasma uniformity in high frequency,
electronegative capacitive discharges,"
J. Vac. Sci. Technol. A
vol. 35, 05C311, July 2017.

DeQi Wen, E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and YouNian
Wang,
"A nonlinear electromagnetics model of an asymmetricallydriven low
pressure capacitive discharge,"
Phys. Plasmas
vol. 24, 083517, August 2017.

DeQi Wen, E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and YouNian
Wang,
"Twodimensional particleincell simulations of standing waves and
waveinduced hysteresis in asymmetric capacitive discharges,"
Journal of Physics D: Applied Physics
vol. 50, 495201 (November 2017).

E. Kawamura, M.A. Lieberman and A.J. Lichtenberg
"Ionization Instability Induced Striations in Low Frequency and
Pulsed He/H2O Atmospheric Pressure Plasmas,"
Physics of Plasmas
vol. 25, 013535 (January 2018).

Kai Zhao, YongXin Liu, E. Kawamura, DeQi Wen, M. A. Lieberman, and YouNian
Wang, "Experimental investigation of standing wave effect
in dualfrequency capacitively coupled argon discharges:
role of low frequency source,"
Plasma Sources Sci. Technol.
vol. 27, 055017 (May 2018).

E. Kawamura, M.A. Lieberman and A.J. Lichtenberg
"Symmetry breaking in high frequency, symmetric capacitively coupled
plasmas,"
Physics of Plasmas
vol. 25, 093517 (September 2018)

Kai Zhao, DeQi Wen, YongXin Liu, M.A. Lieberman, D.J. Economou and YouNian Wang,
"Observation of Nonlinear Standing Waves Excited by Plasma Series
ResonanceEnhanced Harmonics in Capacitive Discharges,"
Phys. Rev. Lett.
vol. 122, 185002 (May, 2019).

R. Lucken, A. Bourdon, M. A. Lieberman, and P. Chabert
"Instabilityenhanced transport in low temperature magnetized plasma,"
Physics of Plasmas,
vol. 26, 070702, July 2019.

E. Kawamura, M.A. Lieberman and A.J. Lichtenberg,
"Multimode Ionization Instability Induced Striations in RF driven
He/H2O Atmospheric Pressure Plasma (APP) Discharges,"
Physics of Plasmas,
vol. 26, Sept 2019.

E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and P. Chabert,
"Particleincell simulations and passive bulk model of collisional
capacitive discharge,"
Journal of Vacuum Science and Technology A,
vol. 38, 023003, March 2020.

R. Lucken, A. Tavant, A. Bourdon, M. A. Lieberman and P. Chabert,
"Saturation of the magnetic confinement in weakly ionized plasma",
Plasma Sources Science and Technology,
vol. 29, 065014, June, 2020.

JianKai Liu, E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and
YouNian Wang,
"Nonlinear harmonic excitations in collisional, asymmetricallydriven
capacitive discharges,"
Plasma Sources Science and Technology,
vol. 30, 045017, April 2021.

E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and P. Chabert,
"Particleincell simulations of the alpha and gamma modes in collisional
nitrogen capacitive discharges,"
Plasma Sources Science and Technology,
vol. 30, 035001, March 2021.

DeQi Wen, J. Krek, J.T. Gudmundsson, E. Kawamura, M.A. Lieberman, and J.P. Verboncoeur,
"Benchmarked and upgraded particleincell simulations of a
capacitive argon discharge at intermediate pressure: the role of
metastable atoms,"
Plasma Sources Science and Technology,
vol. 30, 105009, October 2021.

J.T. Gudmundsson, J. Krek, DeQi Wen, E. Kawamura, and M.A. Lieberman,
"Surface effects in a capacitive argon discharge in the intermediate
pressure regime,"
Plasma Sources Science and Technology,
vol. 30, 125011, January 2022.

DeQi Wen, J. Krek, J.T. Gudmundsson, E. Kawamura, M.A. Lieberman, and J.P. Verboncoeur,
"Particleincell simulations with fluid metastable atoms in
capacitive argon discharges: electron elastic scattering and plasma
density profile transition,"
to appear in
IEEE Transactions on Plasma Science, 2022.