1999 Publications

1990 | 1991 | 1992 | 1993 | 1994 | 1995 | 1996 | 1997 | 1998 | 1999

The year 1999 yielded the first micromechanical resonator with center frequency near 100-MHz and Q greater than 7,000, debunking a popular belief at the time that useful MEMS-based resonators were limited to the low tens of megahertz. This resonator introduced concepts instrumental to maximizing the Q of high frequency resonators still in use today, including and especially non-intrusive quarter wavelength supports to isolate the resonator from its substrate and virtually levitate it. This year also brought the first practical application of the in situ localized annealing method introduced in 1997 for the purposes of resonator drift reduction.

K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen, “VHF free-free beam high-Q micromechanical resona­tors,” Technical Digest, 12th International IEEE Micro Electro Mechanical Systems Conference, Orlando, Florida, Jan. 17-21, 1999, pp. 453-458.

C. T.-C. Nguyen, A.-C. Wong, and H. Ding, “Tunable, switchable, high-Q VHF microelectromechanical bandpass filters,” Digest of Technical Papers, 1999 IEEE International Solid-State Circuits Conference, San Francisco, California, Feb. 15-17, 1999, pp. 78-79, 448.

C. T.-C. Nguyen, “Micromechanical filters for miniaturized low-power communications (invited),” Proceedings of SPIE: Smart Structures and Materials (Smart Electronics and MEMS), Newport Beach, California, March 1-5, 1999, pp. 55-66.

C. T.-C. Nguyen and R. T. Howe, “An integrated CMOS micromechanical resonator high-Q oscillator,” IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999. (16 pages)

T. C. Nolan, C. T.-C. Nguyen, and W. E. Stark, “Direct down-conversion of passband signals using MEMS filters and sub-sampling,” Proceedings of the 1999 IEEE Vehicular Technology Conference, Amsterdam, The Netherlands, Sept. 19-22, 1999, pp. 1896-1899.

V. L. Rabinovich, M. Deshpande, J. R. Gilbert, M.-A. Getillat, N. de Rooij, J. R. Clark, and C. T.-C. Nguyen, “Prediction of mode frequency shifts due to electrostatic bias,” Digest of Technical Papers, 10^th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 442-445.

J. Cao and C. T.-C. Nguyen, “Drive amplitude dependence of micromechanical resonator series motional resistance,” Digest of Technical Papers, 10^th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1826-1829.

W.-T. Hsu, S. Lee, and C. T.-C. Nguyen, “In situ localized annealing for contamination resistance and enhanced stability in nickel micromechanical resonators,” Digest of Technical Papers, 10^th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 932-935.

A.-C. Wong, J. R. Clark, and C. T.-C. Nguyen, “Anneal-activated, tunable, 65MHz micromechanical filters,” Digest of Technical Papers, 10^th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1390-1393.

C. T.-C. Nguyen, “Micromechanical components for miniaturized low-power communications (invited),” Proceedings, 1999 IEEE MTT-S International Microwave Symposium RF MEMS Workshop (on Microelectromechanical Devices for RF Systems: Their Construction, Reliability, and Application), Anaheim, California, June 18, 1999, pp. 48-77.

C. T.-C. Nguyen, “Frequency-selective MEMS for miniaturized low-power communication devices (invited),” IEEE Trans. Microwave Theory Tech., vol. 47, no. 8, pp. 1486-1503, Aug. 1999. (18 pages)

J. W. Weigold, A.-C. Wong, C. T.-C. Nguyen, and S. W. Pang, “A merged process for thick single crystal Si resonators and conventional BiCMOS Circuitry,” IEEE/ASME J. Microelectromech. Syst., vol. 8, no. 3, pp. 221-228, Sept. 1999. (8 pages)

K. Wang and C. T.-C. Nguyen, “High-order medium frequency micromechanical electronic filters,” IEEE/ASME J. Microelectromech. Syst., vol. 8, no. 4, pp. 534-557, Dec. 1999. (24 pages).