1990 | 1991 | 1992 | 1993 | 1994 | 1995 | 1996 | 1997 | 1998 | 1999
The year 1996 produced the first correctly designed (i.e., with beam resonators, coupling beam, and termination resistance chosen using a proper design flow) spring-coupled micromechanical IF filter. (In previous publications, we just slapped mechanical parts together and hoped for the best. Yes, a crude approach, but that’s exploration. It’s a good thing we had the courage to explore.)
F. D. Bannon III and C. T.-C. Nguyen, “High frequency microelectromechanical IF filters,” Technical Digest, 1996 IEEE Electron Devices Meeting, San Francisco, CA, Dec. 8-11, 1996, pp. 773-776.