2012 Publications

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  • Surface-Micromachined PSG-Reflowed Optomechanical Resonator [2012]
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  • 3-GHz CVD Polydiamond Ring Resonator Holding the On-Chip Frequency-Q Product Record [2012]
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  • Scaled Folded-Beam Comb-Driven Resonator for a 32-kHz Real-Time Clock [2012]
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The year 2012 saw a 3-GHz CVD polydiamond ring resonator set the room-temperature record for on-chip frequency-Q product at 1.27×1014 — a mark that still stands today. It also ushered in surface-micromachined optomechanical ring resonators constructed of reflowed PSG with respectable frequencies and Q‘s that set the stage for nitride Q-boosted versions to come. Finally, this year produced a tiny real-time clock featuring a scaled surface-micromachined polysilicon folded-beam comb-driven resonator with sub-micron dimensions enabled by deep-UV lithography.

T. O. Rocheleau, T. L. Naing, Z. Ren, and C. T.-C. Nguyen, “Acoustic whispering gallery mode resonator with Q >109,000 at 515 MHz,” Tech. Digest, 2012 IEEE Int. Micro Electro Mechanical Systems Conference, Paris, France, Jan. 29 – Feb. 2, 2012, pp. 672-675.

K. E. Grutter, A. Grine, M.-K. Kim, N. Quack, T. Rocheleau, C. T.-C. Nguyen, M. C. Wu, “A platform for on-chip silica optomechanical oscillators with integrated waveguides,” Proceedings, 2012 Conf. on Lasers and Electro-Optics (CLEO 2012), May 6-11, 2012, San Jose, California, pp. CW1M.5.pdf.

T. L. Naing, T. Beyazoglu, L. Wu, M. Akgul, Z. Ren, T. O. Rocheleau, and C. T.-C. Nguyen, “2.97-GHz CVD diamond ring resonator with Q >40,000,” Proceedings, 2012 IEEE Int. Frequency Control Symp., Baltimore Maryland, May 21-24, 2012, pp. 570-575.

H. G. Barrow, T. Naing, R. A. Schneider, T. O. Rocheleau, V. Yeh, Z. Ren, and C. T.-C. Nguyen, “A real-time 32.768-kHz clock oscillator using a 0.0154-mm2 micromechanical resonator frequency-setting element,” Proceedings, IEEE Int. Frequency Control Symp., Baltimore, Maryland, May 21-24, 2012, pp. 282-287.

T. L. Naing, T. O. Rocheleau, Z. Ren, E. Alon, and C. T.-C. Nguyen, “Vibration-Insensitive 61-MHz Micromechanical Disk Reference Oscillator,” Proceedings, 2012 IEEE Int. Frequency Control Symp., Baltimore Maryland, May 21-24, 2012, pp. 276-281.

A. J. Grine, N. Quack, K. Grutter, T. O. Rocheleau, J. Huang, C. T.-C. Nguyen, and M. C. Wu, “Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references,” Proceedings, 2012 Int. Conf. on Optical MEMS and Nanophotonics (MOEMS’12), Aug. 6-9, 2012, pp. 51-52.