2011 Publications

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  • Capacitive-Piezoelectric Coupled Wine-Glass Disk AlN Resonator With Q >12,000 [2011]
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  • 1st Hollow Stem Disk Resonator [2011]
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The year 2011 saw capacitive-piezoelectric coupled wine-glass AlN resonators with Q‘s exceeding 12,000, which was a milestone for thin-film deposited AlN resonators; as well as polysilicon capacitive-gap transduced resonators using hollow stems to suppress energy loss to the substrate, enabling extremely high Q‘s. This year also marked the return of CVD diamond devices, this time using hot-filament CVD, offering much higher frequencies with higher Q’s than polysilicon and proving that this method of deposition is every bit as effective as the microwave CVD used previously. Finally, the first MEMS-based Class E power amplifier using a micromechanical resoswitch to achieve power gain came this year.

W.-C. Li, Y. Jiang, R. A. Schneider, H. G. Barrow, L. Lin, and C. T.-C. Nguyen, “Polysilicon-filled carbon nanotube grass structural material for micromechanical resonators,” Tech. Digest, 24th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS’11), Cancun, Mexico, Jan. 24-28, 2011, pp. 477-480.

L.-W. Hung and C. T.-C. Nguyen, “Capacitive-piezoelectric AlN resonators with Q>12,000,” Tech. Digest, 24th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS’11), Cancun, Mexico, Jan. 24-28, 2011, pp. 173-176.

M. Akgul, Z. Ren, and C. T.-C. Nguyen, “Voltage-controlled tuning to optimize MEMS resonator array-composite output power,” Proceedings, 2011 IEEE Int. Frequency Control Symp., San Francisco, California, May 1-5, 2011, pp. 753-758.

M. Akgul, R.Schneider, Z. Ren, G. Chandler, V. Yeh, and C. T.-C. Nguyen, “Hot filament CVD conductive microcrystalline diamond for high Q, high acoustic velocity micromechanical resonators,” Proceedings, 2011 IEEE Int. Frequency Control Symp., San Francisco, California, May 1-5, 2011, pp. 753-758.

L. Wu, M. Akgul, Z. Ren, Y. Lin, W.-C. Li, T. Rocheleau, and C. T.-C. Nguyen, “Hollow stems for higher UHF micromechanical disk resonator quality factor,” Proceedings, 2011 IEEE Int. Ultrasonics Symp., Orlando, FL, Oct. 18-21, 2011, pp. 1964-1967.

Y. Lin, T. Riekkinen, W.-C. Li, E. Alon, and C. T.-C. Nguyen, “Metal micromechanical resonant switch for On-Chip Power Applications,” Tech. Digest, IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7, 2011, pp. 497-500.