1997 Publications

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The year 1997 delivered several key innovations: The first properly designed three-resonator spring-coupled micromechanical filter, the invention of localized annealing for frequency trimming and Q factor enhancement (later copied by many), and low velocity spring-coupling to retain reasonable spring dimensions when realizing narrow bandwidths for channel-select filters. The filters were all very low frequency–in the 455-kHz AM range–but were precursors to the much higher frequency filters to come a decade later.

K. Wang and C. T.-C. Nguyen, “High-order micromechanical electronic filters,” Proceedings, 1997 IEEE International Micro Electro Mechanical Systems Workshop, Nagoya, Japan, Jan. 26-30, 1997, pp. 25-30.

C. T.-C. Nguyen, “High-Q micromechanical oscillators and filters for communications (invited),” Proceedings, 1997 IEEE International Symposium on Circuits and Systems, Hong Kong, June 9-12, 1997, pp. 2825-2828.

J. R. Clark, A.-C. Wong, and C. T.-C. Nguyen, “Parallel-resonator HF Micromechanical Bandpass Filters,” Digest of Technical Papers, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, June 16-19, 1997, pp. 1161-1164.

K. Wang, A.-C. Wong, W.-T. Hsu, and C. T.-C. Nguyen, “Frequency-trimming and Q-factor enhancement of micromechanical resonators via localized filament annealing,” Digest of Technical Papers, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, June 16-19, 1997, pp. 109-112.

K. Wang, F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, “Q-enhancement of micromechanical filters via low-velocity spring coupling” Proceedings, 1997 IEEE International Ultrasonics Symposium, Toronto, Ontario, Canada, Oct. 5-8, 1997, pp. 323-327.