1992 Publications

1990 | 1991 | 1992 | 1993 | 1994 | 1995 | 1996 | 1997 | 1998 | 1999

1992 bore more graduate student publications in Roger Howe’s group at UC Berkeley. The first MEMS-based mechanical filter paper presented at MEMS’92 was actually more a “shot in the dark” design, with a coupling spring that was just plopped down in layout rather than properly designed. The filter used air damping to flatten its passband–a termination approach that completely wrecks the insertion loss. But hey, someone had to take a shot. Fortunately, we fixed all of this ten years later.

The IEDM paper later in the year became the first to apply electronics to control the effective Q (or linewidth) of a micromechanical resonator–something seen more commonly today to both lower and/or raise Q for various applications.

L. Lin, C. T.-C. Nguyen, R. T. Howe, and A. P. Pisano, “Micro electromechanical filters for signal processing,” Technical Digest, IEEE Micro Electromechanical Systems Workshop, Travemunde, Germany, Feb. 4-7, 1992, pp. 226-231.

C. T.-C. Nguyen and R. T. Howe, “Quality factor control for micromechanical resonators,” Technical Digest, IEEE International Electron Devices Meeting, San Francisco, California, December 14-16, 1992, pp. 505-508.