1991 Publications

1990 | 1991 | 1992 | 1993 | 1994 | 1995 | 1996 | 1997 | 1998 | 1999

  • The Electromechanical Amplitude Modulation Technique That Yielded the First Electrical Measurements of Comb-Driven Folded-Beam Resonance in Air [1991]
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The year 1991 yielded publications that disseminated key techniques to measure the frequency response and other attributes of micromechanical resonators, whether in air (low Q) or vacuum (high Q). This is where the art of MEMS measurement to circumvent masking parasitics began and culminated with both the Gated Sinusoid and Electromechanical Amplitude Modulation (EAM) techniques.

C. T.-C. Nguyen and R. T. Howe, “Electromechanical characterization of microresonators for circuit applications,” Tech. Dig., MICRO Program, 1991.

C. T.-C. Nguyen, “Electromechanical characterization of microresonators for circuit applications,” M. S. Report, Dept. of Electrical Engineering and Computer Sciences, University of California at Berkeley, April 1991.