Biographical Information for William G. Oldham
Current Position:
Robert S. Pepper Distinguished Professor, Emeritus
Department of Electrical Engineering and Computer
Science
University of California, Berkeley
Education:
B.S. Carnegie Institute of Technology, 1960
M. S. Carnegie Institute of Technology, 1961
Ph.D. Carnegie Institute of Technology, 1963
Research Interests:
Research in semiconductor materials and process technology. Current research focus: optical and EUV lithography, and maskless lithography for application at feature sizes smaller than 100nm.
Professional Experience:
At Siemens Research Laboratory,
University Activities:
Faculty,
Honors and Awards:
National Science Foundation Senior Postdoctoral
Fellow at Technical
University, Munich, 1970-71; Fellow of IEEE
1981; Guggenheim Fellow, 1985-86; National
Academy of Engineering, 1986; SRC Technical
Excellence Award,
1997;
Publications and Patents:
More than 200 publications and Patents in
semiconductor electronics.
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