Biographical Information for William G. Oldham

Current Position:

Robert S. Pepper Distinguished Professor, Emeritus
Department of Electrical Engineering and Computer Science
University of California, Berkeley


B.S. Carnegie Institute of Technology, 1960
M. S. Carnegie Institute of Technology, 1961
Ph.D. Carnegie Institute of Technology, 1963

Research Interests:

Research in semiconductor materials and process technology.  Current research focus:  optical and EUV lithography, and maskless lithography  for application at  feature sizes smaller than 100nm.

Professional Experience:

At Siemens Research Laboratory, Erlangen, Germany 1963-64. Industrial leave 1974-75 at Intel Corp (Program Manager for Dynamic Rams -Technology Development and Circuit Design). Consultant to various electronics and automotive corporations. Consultant to various legal firms on intellectual property matters. Member, Board of Directors, various public and private corporations.

University Activities:

Faculty, University of California, Berkeley, California since 1964. Director, Electronics Research Laboratory, 1985-90. Principal Investigator, Joint Services Electronics Program, 1985-90. Director, California SEMATECH Center of Excellence, 1988-1996.  Director DARPA/SRC Research Network for Advanced Lithography 1996 - 2005.    Vice Chair Academic Senate, 1996-97, Chair 1997-1998. Chair, Senate Ombudsperson Committee, 1998-2002.  Secretary, Berkeley Division Academic Senate 2003-2004.

Honors and Awards:

National Science Foundation Senior Postdoctoral Fellow at Technical University, Munich, 1970-71;  Fellow of IEEE 1981;  Guggenheim Fellow, 1985-86; National Academy of Engineering, 1986;  SRC Technical Excellence Award, 1997;  SIA  University Research Award, 2003; IEEE Cledo Brunetti Award, 2005;  SPIE Career-Long Contribution Award, 2015.

Publications and Patents:

More than 200 publications and  Patents in semiconductor electronics.