2005 Publications

2000 | 2001 | 2002 | 2003 | 2004 | 2005 | 2006 | 2007 | 2008 | 2009

  • 1st Micromechanical Resonator Reference Oscillator to Meet GSM Phase Noise Specs Using a Wine-Glass Disk Array [2005]
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  • Chip-Scale Atomic Clock Overview Wins Best Paper Award at the 2005 Int. Solid-State Circuits Conference [2005]
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  • Solid-gap Micromechanical Resonator Wins Best Paper Award at the 2005 IEEE Int. Frequency Control Symposium [2005]
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  • Good Linearity Measured for 160-MHz Wine-Glass Disk Resonators [2005]
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The year 2005 produced even more advancements across the board and seeded many results that would further change the landscape of what is possible via micromechanical signal processors. This was the year when MEMS-based oscillator phase noise no longer just approached the GSM spec, but finally met it using the first mechanically-coupled wine-glass disk array-composite with the previously demonstrated singled-ended to differential transresistance amplifier. It also introduced the first micromechanical filter employing a square-plate resonator array-composite that still drives MEMS filter designs today; and the first single-resonator micromechanical filter later emulated by other researchers. The first study of the impact of finite frequency tolerances on filter performance also appeared this year, as well as the first resonator employing solid-capacitive gap transducers later copied in numerous follow-on work by others in the field. Finally, the first dc-bias-switched bank of micromechanical filters appeared this year–a precursor to designs in research even today to make possible RF channel-selecting communication architectures.

C. T.-C. Nguyen, “Vibrating RF MEMS overview: applications to wireless communications,” Proceedings of SPIE: Micromachining and Microfabrication Process Technology, vol. 5715, Photonics West: MOEMS-MEMS 2005, San Jose, California, Jan. 22-27, 2005, pp. 11-25.

Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators,” Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami, Florida, Jan. 30 – Feb. 3, 2005, pp. 219-222.

M. U. Demirci and C. T.-C. Nguyen, “Single-resonator fourth-order micromechanical disk filters,” Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami, Florida, Jan. 30 – Feb. 3, 2005, pp. 207-210.

C. T.-C. Nguyen and J. Kitching, “Towards chip-scale atomic clocks,” Digest of Technical Papers, 2005 IEEE Int. Solid-State Circuits Conference, San Francisco, California, Feb. 6-9, 2005, pp. 84-85. (best paper award winner)

M. U. Demirci and C. T.-C. Nguyen, “A low impedance VHF micromechanical filter using coupled-array composite resonators,” Dig. of Tech. Papers, the 13th Int. Conf. on Solid-State Sensors & Actuators (Transducers’05), Seoul, Korea, June 5-9, 2005, pp. 2131-2134.

C. T.-C. Nguyen, “Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution? (invited),” Dig. of Tech. Papers, the 13th Int. Conf. on Solid-State Sensors & Actuators (Transducers’05), Seoul, Korea, June 5-9, 2005, pp. 243-246.

C. T.-C. Nguyen, “RF MEMS in wireless architectures (invited),” Proceedings, the 42nd Design Automation Conference, Anaheim, California, June 13-17, 2005, pp. 416-420.

S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Self-switching vibrating micromechanical filter bank,” Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141.

Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Vibrating micromechanical resonators with solid dielectric capacitive-transducer ‘gaps’,” Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134. (best paper award winner)

C. T.-C. Nguyen, “MEMS for frequency control and timing (invited),” Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 1-11.

S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “Charge-biased vibrating micromechanical resonators,” Proceedings, IEEE Int. Ultrasonics Symposium, Rotterdam, The Netherlands, Sept. 18-21, 2005, pp. 1596-1599.

S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “Small percent bandwidth design of a 431-MHz notch-coupled micromechanical hollow-disk ring mixer-filter,” Proceedings, IEEE Int. Ultrasonics Symposium, Sept. 18-21, 2005, 1295-1298.

Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators,” Proceedings, IEEE Int. Ultrasonics Symposium, Sept. 18-21, 2005, pp. 1592-1595.

J. R. Clark, W.-T. Hsu, M. A. Abdelmoneum, and C. T.-C. Nguyen, “High-Q UHF micromechanical radial-contour mode disk resonators,” IEEE/ASME J. Microelectromech. Syst., vol. 14, no. 6, pp. 1298-1310, Dec. 2005. (13 pages)

Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Low phase noise array-composite micromechanical wine-glass disk oscillator,” Technical Digest, IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7,  2005, pp. 287-290.

J. Wang, Y. Xie, and C. T.-C. Nguyen, “Frequency tolerance of RF micromechanical disk resonators in nanocrystalline diamond and polysilicon structural materials,” Technical Digest, IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7,  2005, pp. 291-294.