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Tsu-Jae King Liu was born in
NY and raised in the San Francisco Bay Area. She earned her B.S.,
M.S. and Ph.D. degrees in Electrical Engineering from Stanford
University in 1984, 1986 and 1994,
respectively. She joined the Xerox Palo Alto
Research Center as a Member of Research Staff in
1992, to research and develop polycrystalline-silicon thin-film transistor
technologies for high-performance flat-panel display and imaging
applications. During her tenure with Xerox PARC, she served as a
Consulting Assistant Professor of Electrical Engineering at Stanford
University. In August 1996 she joined the faculty of the Department of Electrical Engineering and Computer Sciences (EECS) at the University of California, Berkeley (UC Berkeley), where she is now a Distinguished Professor of EECS. For her excellence in teaching and mentorship she earned the EECS Department's EE Division Outstanding Teaching Award in 2003, the UC Berkeley Distinguished Faculty Mentoring Award 2010, the Semiconductor Research Corporation Aristotle Award in 2016, and the IEEE Electron Devices Society Education Award in 2021.
Dr. Liu conducts research in advanced materials, fabrication processes, and devices for integrated circuits used for computing and memory. She has authored
or co-authored over 560 publications and holds close to 100 patents. Her research has garnered many honors including the Ross M. Tucker AIME Electronics Materials Award (1992)
for seminal work in polycrystalline silicon-germanium thin films, the
DARPA Significant Technical Achievement Award (2000) for development of
the FinFET (the transistor design used in all leading-edge computer chips today), the IEEE Kiyo Tomiyasu Award (2010) for contributions
to nanoscale MOS transistors, memory devices, and MEMs devices, the
Electrochemical Society Dielectric Science and
Technology Division Thomas D. Callinan Award (2011) for excellence in
dielectrics and insulation investigations, the
Intel Outstanding Researcher in Nanotechnology Award (2012), the Semiconductor Industry Association University Researcher Award (2014), and the IEEE Aldert van der Ziel Award (2016).
Dr. Liu has served in a variety of administrative leadership roles throughout her career. From 2000 to 2004 and from 2006
to 2008, she served as the Faculty Director of the UC Berkeley
Microfabrication Laboratory. From 2003 to
2004, she also served as Vice Chair for Graduate Matters in the EECS
Department. In 2004-2006 she took industrial leave from the university to work as Senior Director of
Engineering in the Advanced Technology Group of Synopsys,
Inc. (Mountain View, CA). From July 2008 through June 2012 she was Associate Dean for Research in the College of Engineering.
From July 2012 through June 2016 she was Chair of the Electrical Engineering Division, and from July 2014 through June 2016 she was Chair of the EECS Department. From July 2016 through September 2016 she served as Associate Dean for Academic Planning and Development in the College of Engineering. From October 2016 through June 2018 she served as UC Berkeley Vice Provost for Academic and Space Planning. Since July 1, 2018 she has led the College of Engineering as Dean and Roy W. Carlson Professor of Engineering. Her leadership also has garnered many honors including the Chang-Lin Tien Leadership in Education Award in 2020 and the IEEE Founder's Medal in 2024.
Dr. Liu is a Fellow
of the Institute of
Electrical and Electronics Engineers (IEEE), an elected member of the
U.S. National Academy of Engineering (NAE), a Fellow of the
National Academy of Inventors and a member of the Silicon Valley Engineering Hall of Fame.
She has served on committees for
many technical conferences including the Device Research Conference, the
International Conference on Solid State Devices and Materials, the
International Electron Devices Meeting, and the Symposium on VLSI
Technology, and she was a member of the IEEE EDS VLSI
Technology and Circuits Technical Committee. She has served as Editor-in-Chief for IEEE Electron Device Letters, and as Vice President for Publications and Products for the IEEE Electron Devices Society. She is a past member of the IEEE Executive Committee of the Symposia on VLSI Technology and Circuits.
Dr. Liu presently serves as a member of both the U.S. Department of Commerce National Institute for Standards and Technology (NIST) Industrial Advisory Committee
and the U.S. National Science Foundation
Directorate for Engineering Advisory Committee. She is a Director of Intel Corporation and Maxlinear, Inc.