Close up of the wing differential on 02γ 
Fourbar Dimensions See solidworks drawings for complete dimensions. 
Link lengths (mm)  6, 6, 6, 1 
Flexure lengths (μm)  50, 50, 112.5, 112.5  
Flexure widths (mm)  3,2,2,2.5  
Slider crank dimensions  Attachment point (mm)  1.5 
Wing Differential Dimensions See solidworks drawings for complete dimensions. 
Leading and lagging spar lengths (mm)  2,3 
Leading and lagging spar inertias (mgmm^2)  2,3  
Distance between spars (mm)  1  
Differential Transmission ratio  2  
Inertia of middle portion of differential (mgmm^2)  md1 = 4.4, md2 = 0.37, md12 = 1.02  
Flexure lengths (μm)  l_ψ = l_ θ3 = 175. l_φ = l_θ1 = l_θ2 = 50 

Flexure widths (mm) 
w_ψ = w_θ1 = w_θ2 = w_ θ3 = 1 w_φ = 2 

Actuator parameters  Dimensions (mm)  (10 + 6) x 3 
Serial Numbers  02270201M, 02270205M  
DC displacements (μm @ 150V)  315, 337  
Stiffneses (N/m)  122, 122  
Blocking force (mN @ 150V)  43, 43  
Resonant Frequency (Hz)  621, 529  
Q (= Xac/Xdc*150/Vac)  18.6, 21.76 