EE 147/247A Introduction to MEMS

Fall 2016

MWF 1-2, 3106 Etcheverry  (ROOM CHANGE FRIDAY WEEK 2!)

Class info, homework questions, discussion, etc: piazza

Grades: bcourses

All homework

Lectures are linked to the date of the lecture in the syllabus below, or just browse the lecture directory

My policy on CHEATING.  READ IT!

Instructor

 

Office Hours

Kristofer S.J. Pister, pister@eecs.berkeley.edu

512 Cory Hall 


Tu 3:30-4:30, F 3-4 or whenever my door is open (which is often)

TA

Office Hours

Dan Contreras, dscontreras@berkeley.edu

W 3-4, Th 1-2 location tba

Required Texts

none

Useful Texts

Jaeger, Introduction to Microelectronic Fabrication, 2nd edition, under $20 used at amazon (highly recommended)

-----------------------------------------------------

Kaajakari, Practical MEMS

Kubby, A Guide to Hands-on MEMS Design and Prototyping

Kovacs, Micromachined Transducers Sourcebook

Liu, Foundations of MEMS, 2nd edition

Senturia, Microsystem Design

Madou, Fundamentals of Microfabrication

Young, Roark’s Formulas for Stress and Strain

 

Grading

 

EE147

EE247A

Homework

35%

35%

Midterm

25%

20%

Final 

40%

20%

Final Project

 

25%

 

Homework

Collaboration is encouraged; copying is not.  Explaining how you solved a problem to someone is fine; handing them your solutions is not.  Helping someone debug their design is fine; giving them your design is not.

Write your own answers without staring at someone else's. (see cheating policy above)

Lectures

My nearly indecipherable notes are generally online a day or two after class (linked below).



Schedule

Week

Date/

Notes

Topic

Reading / Resources

Homework

1

8/24

8/26

Logistics; What is MEMS; Applications; Course overview, history, & examples

Single-mask SOI process

Single-mask SOI motor

Jaeger: skim chapter 1, and 2.1—2.4.  Make sure that you understand Figures 2.{2, 6, 7, 9+11}

hw1 rubric

self-report

2

8/29 annotated

8/31

9/2

[video lecture] Single-mask capacitive accelerometer

simple differential capacitive accelerometer

Surface micromachining; three-mask process;

Jaeger: 11.1, 11.4

 

3

9/5

9/7

9/9

Labor Day

Electrostatic Actuators, Gauss, d’Alambert

Standard Processes: SOIMUMPs, POLYMUMPs, polyMUMPS pictures, SOIMUMPS pictures

polyMUMPS thermal actuator

Sandia motor videos

planar robot video

hw2 rubric

4

9/12

9/14

9/16

Stress and strain, beam bending,

flexure design, torsion,

residual stress, stress gradients, buckling

Euler-Bernoulli beams

optional reading: Silicon Failure

hw3 rubric

5

9/19

9/21

9/23

Couette damping, (squeeze-film damping)

Resonance, transfer function

Tang, Nguyen, Howe comb drive resonator

Inchworms

hw4 rubric

6

9/26

9/28

9/30

[video/guest] Transfer function

Electrostatics: capacitance, actuation, sensing

hw5 rubric

7

10/3

10/5

10/7

Self-sustaining oscillators; Piezoresistivity, strain gauges

Wheatstone, TCR

thermal conduction, black body radiation

Fall 2013 midterm

Fall 2014 midterm

Fall 2015 midterm

TCR Gauge factor Black body

hw6 rubric

8

10/10

10/12

10/14

Midterm

Rayleigh-Ritz, Paschen, Field emission

stability and pull-in, spring tuning

Midterm solutions

247A project

 

9

10/17

10/19

10/21

MEMS fabrication, HNA, XeF2

bulk micromachining: crystal planes, etch rates

KOH etching

Jaeger Ch 11

hw7 rubric

10

10/24

10/26

10/28

Dan Contreras: Micro Robots

Standard processes; Semiconductors: Bohr à diodes

Ion implantation; diffusion; thermal oxidation; diffused piezoresistor

Jaeger Ch 6

hw8 rubric

11

10/31

11/2

11/4

CMOS process cross section

Standard processes: CMOS MEMS

fabrication: evaporation, liftoff

Invensense/Nasiri

Nasiri paper

CMOS-MEMS

Fedder2002 Intel 22nm Jaeger 9.3

hw9 p1excel

rubric

12

11/7

11/9

11/11

Guest Lecture: Prof. Ming Wu, Optical MEMS

fabrication: sputtering

Veterans Day – Academic and Administrative Holiday

Wikipedia:sputter deposition

hw10 rubric

13

11/14

11/16

11/18

plasma etching; RIE ; DRIE

LPCVD;

Residual stress

Jaeger

hw11 rubric

14

11/21

11/23

11/25

Guest Lecture: Prof. Dorian Liepmann, “Micro-fluid dynamics”

Thanksgiving non-instructional day (?!?)

academic holiday

 

15

11/28

11/30

12/2

LPCVD: mousebites, sidewalls

thermal noise

noise equivalent input; stiction

hw12 rubric

hw12p6figs

16

12/5

12/7

12/9

No class Monday

WF  247 final project presentations.  147 students strongly encouraged to attend.

247: Final projects due 5pm Monday 12/12 by both email and hardcopy at 512 Cory Hall.

Fall2013 Final

Fall2014 Final

2015 Final

2015 Final Solutions