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| Name | Last modified | Size | Description |
|---|---|---|---|---|
| Parent Directory | - | ||
| 15FAmidterm-soln.pdf | 2015-10-18 14:52 | 1.1M | |
| 15faFinal2.pdf | 2015-12-18 11:20 | 247K | |
| Aspect ratio depende..> | 2015-11-18 15:29 | 308K | |
| Assembly2a.ppt | 2015-11-04 14:24 | 7.9M | |
| Brockmeier12.pdf | 2015-10-23 09:50 | 1.1M | |
| CMOS-MEMS3a.pptx | 2015-11-02 16:04 | 3.9M | |
| Chu97.pdf | 2015-10-23 09:27 | 500K | |
| Fab1.ppt | 2005-01-21 10:36 | 750K | |
| Fab2.ppt | 2001-09-11 10:25 | 12M | |
| Fedder97.pdf | 2015-11-02 14:41 | 266K | |
| Final15FAsolutions.pdf | 2015-12-18 11:16 | 3.7M | |
| Fouladi2006 RF MEMS ..> | 2015-11-23 14:24 | 871K | |
| Hopcroft10.pdf | 2015-10-20 17:35 | 561K | |
| Invensas_MEPTEC2014_..> | 2015-09-08 16:25 | 1.8M | |
| Lin2015.pdf | 2015-11-03 16:44 | 10M | |
| LiquidElectrostatics..> | 2015-08-25 15:34 | 902K | |
| PiezoMUMPs.DR.1.3a.pdf | 2015-10-27 11:15 | 341K | |
| PiezoRresonator.pdf | 2015-11-04 14:39 | 759K | |
| SBM.pdf | 2015-10-23 15:39 | 562K | |
| SOIMUMPs.dr.v8.0.pdf | 2015-11-03 15:05 | 353K | |
| SOIpiezoresistiveRes..> | 2015-11-24 15:24 | 759K | |
| Sato-basic-KOH-02.pdf | 2015-10-23 15:34 | 4.5M | |
| SonicAndTailsGrading..> | 2015-10-18 15:14 | 1.1M | |
| TSMCmems.pdf | 2015-09-01 09:21 | 883K | |
| TangNguyenHowe89.pdf | 2015-09-25 15:50 | 1.9M | |
| Thumbs.db | 2016-08-30 14:49 | 169K | |
| Wang2007.pdf | 2015-11-03 16:32 | 545K | |
| Williams03.pdf | 2015-10-23 08:32 | 1.0M | |
| Xie2005.pdf | 2015-11-02 15:05 | 475K | |
| Xie2006.pdf | 2015-11-02 15:02 | 725K | |
| anisotropic Quartz e..> | 2015-11-24 15:22 | 175K | |
| ee147intro15.ppt | 2015-08-26 17:16 | 18M | |
| polyMUMPSpictures.pptx | 2013-09-13 10:45 | 2.8M | |
| xie-2000.pdf | 2015-11-02 14:44 | 106K | |