Plate Capacitance

• W >> H: Parallel Plate Model

  • k = dielectric constant
  • = permitivity of free space

• W ? H: Fringing Model

  • C ? log(W)

• For DSM processes, fringing model applies

  • At 0.6?m, W/H ? 2, so Parallel Plate model applies
  • At 0.35?m, W/H ? 1, so Fringing model applies

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