Revised 01/31/03 

UCB TCAD Process Technology Notes

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Maintained by Professor Andy Neureuther   email

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This is a new endeavor in Spring of 2003 to put on-line materials used in classes to augment available textbooks. The material consists of various snippets of notes that will be rolled out as the material is covered in the teaching of EECS 243. More advanced materials on lithography research will also be added by the students in the TCAD group at UC Berkeley.

About Process Technology Notes

This is an evolving mini-library of snipits of materials on physically based  model for characterizing microfabrication technology. It tends emphasize optical lithography as this is the main interest of the TCAD Group at UC Berkeley.

The purpose is to make available globally two types of information of likely practical use in microfabrication.