![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/SingleDigitNmGapResonator.ctnguyen.jpg\")
Single-Digit-Nm Capacitive-Gap Transducer Micromechanical Disk Resonator With Q<\/em> >10,000 and Motional Resistance < 150 Ohms [2020]
Read More<\/a><\/figcaption><\/figure><\/li>![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/LowFreqkeStrainSensor.ctnguyen.jpg\")
Resonant Beam Strain Sensor Employing Gap-Dependent Frequency Shift [2020]
Read More<\/a> <\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\n![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/MEMSDiskPierceOsc.ctnguyen.jpg\")
60-MHz Micromechanical Wine-Glass Disk Pierce Oscillator Setting a Best-in-Class 1-kHz offset FoM of -231 dB [2020]
Read More<\/a><\/figcaption><\/figure><\/li>![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/199MHzDiskArrayOscillator.ctnguyen.jpg\")
199-MHz MEMS Disk Array-Composite Pierce Oscillator [Best Ppaer Award Winner, 2020]
Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\nThe year 2020 finally brought about the first capacitive-gap transduced VHF micromechanical resonators with single-digit nanometer gaps with all the advertised electromechanical coupling and preserved Q<\/em> advantages and poised to transform the application space for on-chip MEMS resonators. It also introduced a lower frequency version of the electrical-stiffness-based resonant strain sensor of the previous year and produced two ground-breaking MEMS-based oscillator papers: a journal paper teaching detailed MEMS-based Pierce oscillator analysis and design methodology; and a conference paper employing a 199-MHz disk array-composite resonator in a Pierce circuit that garnered a best paper award.<\/p>\n\n\n\n
A. Ozgurluk, K. A. Peleaux, C. T.-C. Nguyen, \u201cSingle-digit-nm capacitive-gap transduced micromechanical disk resonators<\/a>,\u201d Tech. Digest<\/em>, 2020 IEEE Int. Micro Electromechanical Systems Conference, Vancouver, Canada, Jan. 18-22, 2020, pp. 222-225.<\/p>\n\n\n\n
T. L. Naing, T. O. Rocheleau, E. Alon, and C. T.-C. Nguyen, \u201cLow-power MEMS-based Pierce oscillator using a 61-MHz capacitive-gap disk resonator<\/a>,\u201d IEEE Trans. Ultrason., Ferroelect., Freq. Contr.<\/em>, vol. 67, no. 7, pp. 1377-1391, July 2020, online in Jan. 2020, DOI: 10.1109\/TUFFC.2020.2969530<\/a>. (15 pages)<\/p>\n\n\n\n
A. Ozgurluk and C. T.-C. Nguyen, \u201cPrecision residual strain sensor employing gap-dependent frequency shift<\/a>,\u201d Proceedings<\/em>, IEEE Joint Conf. of the IEEE Int. Frequency Contr. Symp. & IEEE Int. Symp. on Applications of Ferroelectrics, Virtual Conference, July 19-23, 2020, DOI: 10.1109\/IFCS-ISAF41089.2020.9234911.<\/p>\n\n\n\n
Q. Xie, S. Afshar, A. Ozgurluk, and C. T.-C. Nguyen, \u201c199-MHz polysilicon micromechanical disk array-composite oscillator<\/a>,\u201d Proceedings<\/em>, IEEE Joint Conf. of the IEEE Int. Frequency Contr. Symp. & IEEE Int. Symp. on Applications of Ferroelectrics, Virtual Conference, July 19-23, 2020, DOI: <\/strong>10.1109\/IFCS-ISAF41089.2020.9234862<\/a>. (best paper award winner<\/em><\/strong>)<\/strong><\/em><\/p>\n","protected":false},"excerpt":{"rendered":"