{"id":722,"date":"2021-05-21T02:58:41","date_gmt":"2021-05-21T02:58:41","guid":{"rendered":"http:\/\/localhost\/ctnsite\/?page_id=722"},"modified":"2021-05-31T03:53:20","modified_gmt":"2021-05-31T03:53:20","slug":"2011-publications-2","status":"publish","type":"page","link":"http:\/\/localhost\/ctnsite\/2011-publications-2\/","title":{"rendered":"2011 Publications"},"content":{"rendered":"\n
The year 2011 saw capacitive-piezoelectric coupled wine-glass AlN resonators with Q<\/em>‘s exceeding 12,000, which was a milestone for thin-film deposited AlN resonators; as well as polysilicon capacitive-gap transduced resonators using hollow stems to suppress energy loss to the substrate, enabling extremely high Q<\/em>‘s. This year also marked the return of CVD diamond devices, this time using hot-filament CVD, offering much higher frequencies with higher Q’s than polysilicon and proving that this method of deposition is every bit as effective as the microwave CVD used previously. Finally, the first MEMS-based Class E power amplifier using a micromechanical resoswitch to achieve power gain came this year.<\/p>\n\n\n\n W.-C. Li, Y. Jiang, R. A. Schneider, H. G. Barrow, L. Lin, and C. T.-C. Nguyen, \u201cPolysilicon-filled carbon nanotube grass structural material for micromechanical resonators<\/a>,\u201d Tech. Digest<\/em>, 24th<\/sup> IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS\u201911), Cancun, Mexico, Jan. 24-28, 2011, pp. 477-480.<\/p>\n\n\n\n L.-W. Hung and C. T.-C. Nguyen, \u201cCapacitive-piezoelectric AlN resonators with Q<\/em>>12,000<\/a>,\u201d Tech. Digest<\/em>, 24th<\/sup> IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS\u201911), Cancun, Mexico, Jan. 24-28, 2011, pp. 173-176.<\/p>\n\n\n\n M. Akgul, Z. Ren, and C. T.-C. Nguyen, \u201cVoltage-controlled tuning to optimize MEMS resonator array-composite output power<\/a>,\u201d Proceedings<\/em>, 2011 IEEE Int. Frequency Control Symp., San Francisco, California, May 1-5, 2011, pp. 753-758.<\/p>\n\n\n\n M. Akgul, R.Schneider, Z. Ren, G. Chandler, V. Yeh, and C. T.-C. Nguyen, \u201cHot filament CVD conductive microcrystalline diamond for high Q<\/em>, high acoustic velocity micromechanical resonators<\/a>,\u201d Proceedings<\/em>, 2011 IEEE Int. Frequency Control Symp., San Francisco, California, May 1-5, 2011, pp. 753-758.<\/p>\n\n\n\n L. Wu, M. Akgul, Z. Ren, Y. Lin, W.-C. Li, T. Rocheleau, and C. T.-C. Nguyen, \u201cHollow stems for higher UHF micromechanical disk resonator quality factor<\/a>,\u201d Proceedings<\/em>, 2011 IEEE Int. Ultrasonics Symp., Orlando, FL, Oct. 18-21, 2011, pp. 1964-1967.<\/p>\n\n\n\n