{"id":696,"date":"2021-04-21T04:02:52","date_gmt":"2021-04-21T04:02:52","guid":{"rendered":"http:\/\/localhost\/ctnsite\/?page_id=696"},"modified":"2021-05-31T03:49:30","modified_gmt":"2021-05-31T03:49:30","slug":"2010-publications","status":"publish","type":"page","link":"http:\/\/localhost\/ctnsite\/2010-publications\/","title":{"rendered":"2010 Publications"},"content":{"rendered":"\n<h2><a href=\"http:\/\/localhost\/ctnsite\/2010-publications\/\">2010<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2011-publications-2\/\">2011<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2012-publications\/\">2012<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2013-publications\/\">2013<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2014-publications\/\">2014<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2015-publications\/\">2015<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2016-publications\/\">2016<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2017-publications\/\">2017<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2018-publications\/\">2018<\/a> | <a href=\"http:\/\/localhost\/ctnsite\/2019-publications\/\">2019<\/a><\/h2>\n\n\n\n<figure class=\"wp-block-gallery columns-1 is-cropped\"><ul class=\"blocks-gallery-grid\"><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" width=\"740\" height=\"460\" src=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/CapPiezoRing.ctnguyen.jpg\" alt=\"\" data-id=\"698\" data-full-url=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/CapPiezoRing.ctnguyen.jpg\" data-link=\"http:\/\/localhost\/ctnsite\/cappiezoring-ctnguyen\/\" class=\"wp-image-698\" srcset=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/CapPiezoRing.ctnguyen.jpg 740w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/CapPiezoRing.ctnguyen-300x186.jpg 300w\" sizes=\"(max-width: 740px) 100vw, 740px\" \/><figcaption class=\"blocks-gallery-item__caption\">1st Capacitive-Piezoelectric Transducer [2010]<br><a href=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/CapPiezo.hh10.lwhungctnguyen.web_.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\n<figure class=\"wp-block-gallery columns-2 is-cropped\"><ul class=\"blocks-gallery-grid\"><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" width=\"899\" height=\"506\" src=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideBasedGaps.ctnguyen.jpg\" alt=\"\" data-id=\"699\" data-full-url=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideBasedGaps.ctnguyen.jpg\" data-link=\"http:\/\/localhost\/ctnsite\/silicidebasedgaps-ctnguyen\/\" class=\"wp-image-699\" srcset=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideBasedGaps.ctnguyen.jpg 899w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideBasedGaps.ctnguyen-300x169.jpg 300w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideBasedGaps.ctnguyen-768x432.jpg 768w\" sizes=\"(max-width: 899px) 100vw, 899px\" \/><figcaption class=\"blocks-gallery-item__caption\">First Demonstration of Silicide-Based Gaps [2010]<br><a href=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/SilicideGap.mems10.lwhung.ctnguyen.web_.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">Read More<\/a><\/figcaption><\/figure><\/li><li class=\"blocks-gallery-item\"><figure><img loading=\"lazy\" width=\"1024\" height=\"955\" src=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen-1024x955.jpg\" alt=\"\" data-id=\"697\" data-full-url=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen.jpg\" data-link=\"http:\/\/localhost\/ctnsite\/aldpartialgap-ctnguyen\/\" class=\"wp-image-697\" srcset=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen-1024x955.jpg 1024w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen-300x280.jpg 300w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen-768x716.jpg 768w, http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/ALDpartialGap.ctnguyen.jpg 1055w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><figcaption class=\"blocks-gallery-item__caption\">Simultaneous Strong Electromechanical Coupling and High <em>Q<\/em> Via Partial ALD-Filled Gaps [2010]<br><a href=\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/04\/HighQSolidGap.hh10.makgul.ctnguyen.web_.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\n<div class=\"wp-block-columns\">\n<div class=\"wp-block-column\"><\/div>\n<\/div>\n\n\n\n<p>The year 2010 introduced numerous firsts: a silicide-based release process that made possible instant formation of high aspect-ratio gaps without a need for lengthy undercut etching; the capacitive-piezoelectric transducer that maximizes the quality factor of any piezoelectric device while enhancing drift stability; and partial-ALD filling to achieve electrode-to-resonator gaps smaller than 50 nm&#8211;all methods still in use today. <\/p>\n\n\n\n<p>L.-W. Hung and C. T.-C. Nguyen, \u201c<a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/SilicideGap.mems10.lwhung.ctnguyen.web.pdf\">Silicide-Based Release of High Aspect Ratio Microstructures<\/a>,\u201d&nbsp;<em>Tech. Digest<\/em>, 23<sup>rd<\/sup>&nbsp;IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS\u201910), Hong Kong, China, Jan. 24-28, 2010, pp. 120-123.<\/p>\n\n\n\n<p>B. Kim, M. Akgul, Y. Lin, W.-C. Li, Z. Ren, and C. T.-C. Nguyen, \u201c<a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/AccelSens.bkim.ctnguyen.web.pdf\">Acceleration sensitivity of small-gap capacitive micromechanical resonator oscillators<\/a>,\u201d&nbsp;<em>Proceedings<\/em>, 2010 IEEE Int. Frequency Control Symp., Newport Beach, California, June 1-4, 2010, pp. 273-278.<\/p>\n\n\n\n<p>L.-W. Hung and C. T.-C. Nguyen, \u201c<a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/CapPiezo.hh10.lwhung,ctnguyen.web.pdf\">Capacitive-piezo transducers for higher&nbsp;<em>Q<\/em>&nbsp;contour-mode AlN resonators at 1.2 GHz<\/a>,\u201d&nbsp;<em>Tech. Digest<\/em>, 2008 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, June 6-10, 2010, pp. 463-466.<\/p>\n\n\n\n<p>M. Akgul, B. Kim, Z. Ren, and C. T.-C. Nguyen, \u201c<a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/HighQSolidGap.hh10.makgul.ctnguyen.web.pdf\">Capacitively transduced micromechanical resonators with simultaneous low motional resistance and&nbsp;<em>Q<\/em>&nbsp;&gt;70,000<\/a>,\u201d&nbsp;<em>Tech. Digest<\/em>, 2008 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, June 6-10, 2010, pp. 467-470.<\/p>\n\n\n\n<p>L.-W. Hung and C. T.-C. Nguyen, \u201c<em><a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/PiezoQBoost.iedm10.lwhung.ctnguyen.web.pdf\">Q<\/a><\/em><a href=\"https:\/\/people.eecs.berkeley.edu\/~ctnguyen\/Research\/ConferencePubs\/2010\/PiezoQBoost.iedm10.lwhung.ctnguyen.web.pdf\">-boosted AlN array-composite resonator with&nbsp;<em>Q<\/em>&nbsp;&gt;10,000<\/a>,\u201d&nbsp;<em>Tech. Digest<\/em>, IEEE Int. Electron Devices Mtg., San Francisco, California, Dec. 6-8, 2010, pp. 162-165.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The year 2010 introduced numerous firsts: a silicide-based release process that made possible instant formation of high aspect-ratio gaps without a need for lengthy undercut etching; the capacitive-piezoelectric transducer that maximizes the quality factor of [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/696"}],"collection":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/comments?post=696"}],"version-history":[{"count":14,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/696\/revisions"}],"predecessor-version":[{"id":1097,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/696\/revisions\/1097"}],"wp:attachment":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/media?parent=696"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}