{"id":648,"date":"2021-04-21T00:11:01","date_gmt":"2021-04-21T00:11:01","guid":{"rendered":"http:\/\/localhost\/ctnsite\/?page_id=648"},"modified":"2021-06-06T06:47:23","modified_gmt":"2021-06-06T06:47:23","slug":"2008-publications","status":"publish","type":"page","link":"http:\/\/localhost\/ctnsite\/2008-publications\/","title":{"rendered":"2008 Publications"},"content":{"rendered":"\n
The year 2008 delivered a fully integrated single-chip oscillator that combined in a fully monolithic process a custom CMOS sustaining amplifier with a MEMS-last spring-coupled nickel flexural-mode disk array. While the nickel resonator Q<\/em> was much lower than polysilicon counterparts and questions on aging remained, this first demonstration is a precursor to work more than a decade later to integrate high frequency metal MEMS in ruthenium for oscillator purposes. This year also brought on the first demonstration of partial gap-filling to improve capacitive-gap transducer strength, as well as the first demonstration of a micromechanical resoswitch–a device destined for use in the first all-mechanical communication receiver almost a decade later.<\/p>\n\n\n\n W.-L. Huang, Z. Ren, Y.-W. Lin, H.-Y. Chen, J. Lahann, and C. T.-C. Nguyen, \u201cFully monolithic CMOS nickel micromechanical resonator oscillator<\/a>,\u201d\u00a0Tech. Digest<\/em>, 21st<\/sup>\u00a0IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS\u201908), Tucson, Arizona, Jan. 13-17, 2008, pp. 10-13.<\/p>\n\n\n\n Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, \u201c1.52-GHz micromechanical extensional wine-glass mode ring resonators<\/a>,\u201d IEEE Trans. Ultrason., Ferroelect., Freq. Contr.<\/em>, vol. 55, no. 4, pp. 890-907, April 2008. (18 pages)<\/p>\n\n\n\n C. T.-C. Nguyen, \u201cIntegrated micromechanical radio front-ends (invited plenary)<\/a>,\u201d Proceedings of Tech. Program<\/em>, 2008 IEEE Int. Symp. On VLSI Technology, Systems, and Applications (VLSI-TSA\u201908), Hsinchu, Taiwan, April 21-23, 2008, pp. 3-4.<\/p>\n\n\n\n Y. Lin, W.-C. Li, Z. Ren, and C. T.-C. Nguyen, \u201cA resonance dynamical approach to faster, more reliable micromechanical switches<\/a>,\u201d Proceedings<\/em>, 2008 IEEE Int. Frequency Control Symp., Honolulu, Hawaii, May 19-21, 2008, pp. 640-645.<\/p>\n\n\n\n L.-W. Hung, Z. A. Jacobson, Z. Ren, A. Javey, and C. T.-C. Nguyen, \u201cCapacitive transducer strengthening via ALD-enabled partial-gap filling<\/a>,\u201d Tech. Digest<\/em>, 2008 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, South Carolina, June 1-5, 2008, pp. 208-211.<\/p>\n\n\n\n