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All-Mechanical Resoswitch Receiver and Trigger Detector [2017]
Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\n![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/13nmGapWineGlassDisk.ctnguyen.jpg\")
Wine-Glass Disk With 13-nm Capacitive-Gap Transducers [2017]
Read More<\/a><\/figcaption><\/figure><\/li>![\"\"](\"http:\/\/localhost\/ctnsite\/wp-content\/uploads\/2021\/05\/RuCCBeam.ctnguyen.jpg\")
Ruthenium Clamped-Clamped Beam That Achieves Considerably Higher Q<\/em> Than Polysilicon Equivalents [2017]
Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\nThe year 2017 brought about several landmark achievements. It advanced the practical utility of all-mechanical resoswitch communication devices, introducing the first squegging-based clock generator and the first functional all-mechanical zero-quiescent power trigger detector with no false positives. It delivered the first capacitive-gap transduced 60-MHz micromechanical resonator employing gaps down to 13-nm, making possible a (C<\/em>x<\/em><\/sub>\/Co<\/sub><\/em>)-Q<\/em> product of 480, which was astonishing at the time. Finally, this year achieved the first demonstration of ruthenium resonators that outperform polysilicon equivalents in Q<\/em>, while using fabrication temperatures amenable to future integration directly over modern CMOS. 2017 was the launch point for intense research on gap-scaling and MEMS-CMOS integration to come.<\/p>\n\n\n\n
R. Liu, J. N. Nilchi, and C. T.-C. Nguyen, \u201cCW-powered squegging micromechanical clock generator<\/a>,\u201d Tech. Digest<\/em>, 2017 IEEE Int. Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, Jan. 22-26, 2017, pp. 905-908, DOI: 10.1109\/MEMSYS.2017.7863555<\/a>.<\/p>\n\n\n\n
J. N. Nilchi, R. Liu, and C. T.-C. Nguyen, \u201cHigh Cx<\/sub><\/em>\/Co<\/sub><\/em> 13nm-capacitive-gap transduced disk resonator<\/a>,\u201d Tech. Digest<\/em>, 2017 IEEE Int. Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, Jan. 22-26, 2017, pp. 924-927, DOI: 10.1109\/MEMSYS.2017.7863560<\/a>.<\/p>\n\n\n\n
C. T.-C. Nguyen, R. Liu, and J. N. Nilchi, \u201cAn ultra-low power mechanical trigger detector (invited)<\/a>,\u201d Proceedings<\/em>, 2017 Gov. Microcircuit Applications & Critical Technology Conf., Reno, Nevada, March 20-23, 2017, pp. 104-107.<\/p>\n\n\n\n
A. Ozgurluk, R. Liu, and C. T.-C. Nguyen, \u201cQ<\/em>-boosting of metal MEMS resonators via localized anneal-induced tensile stress<\/a>,\u201d Proceedings<\/em>, IEEE Int. Frequency Control Symp., Besancon, France, July 10-13, 2017, pp. 10-15, DOI: 10.1109\/FCS.2017.8088786<\/a>.<\/p>\n","protected":false},"excerpt":{"rendered":"