The year 2012 saw a 3-GHz CVD polydiamond ring resonator set the room-temperature record for on-chip frequency-Q<\/em> product at 1.27×1014<\/sup> — a mark that still stands today. It also ushered in surface-micromachined optomechanical ring resonators constructed of reflowed PSG with respectable frequencies and Q<\/em>‘s that set the stage for nitride Q<\/em>-boosted versions to come. Finally, this year produced a tiny real-time clock featuring a scaled surface-micromachined polysilicon folded-beam comb-driven resonator with sub-micron dimensions enabled by deep-UV lithography.<\/p>\n\n\n\n
T. O. Rocheleau, T. L. Naing, Z. Ren, and C. T.-C. Nguyen, \u201cAcoustic whispering gallery mode resonator with Q<\/em> >109,000 at 515 MHz<\/a>,\u201d Tech. Digest<\/em>, 2012 IEEE Int. Micro Electro Mechanical Systems Conference, Paris, France, Jan. 29 \u2013 Feb. 2, 2012, pp. 672-675.<\/p>\n\n\n\n
K. E. Grutter, A. Grine, M.-K. Kim, N. Quack, T. Rocheleau, C. T.-C. Nguyen, M. C. Wu, \u201cA platform for on-chip silica optomechanical oscillators with integrated waveguides<\/a>,\u201d Proceedings<\/em>, 2012 Conf. on Lasers and Electro-Optics (CLEO 2012), May 6-11, 2012, San Jose, California, pp. CW1M.5.pdf.<\/p>\n\n\n\n
T. L. Naing, T. Beyazoglu, L. Wu, M. Akgul, Z. Ren, T. O. Rocheleau, and C. T.-C. Nguyen, \u201c2.97-GHz CVD diamond ring resonator with Q<\/em> >40,000<\/a>,\u201d Proceedings<\/em>, 2012 IEEE Int. Frequency Control Symp., Baltimore Maryland, May 21-24, 2012, pp. 570-575.<\/p>\n\n\n\n
H. G. Barrow, T. Naing, R. A. Schneider, T. O. Rocheleau, V. Yeh, Z. Ren, and C. T.-C. Nguyen, \u201cA real-time 32.768-kHz clock oscillator using a 0.0154-mm2<\/sup> micromechanical resonator frequency-setting element<\/a>,\u201d Proceedings<\/em>, IEEE Int. Frequency Control Symp., Baltimore, Maryland, May 21-24, 2012, pp. 282-287.<\/p>\n\n\n\n
T. L. Naing, T. O. Rocheleau, Z. Ren, E. Alon, and C. T.-C. Nguyen, \u201cVibration-Insensitive 61-MHz Micromechanical Disk Reference Oscillator<\/a>,\u201d Proceedings<\/em>, 2012 IEEE Int. Frequency Control Symp., Baltimore Maryland, May 21-24, 2012, pp. 276-281.<\/p>\n\n\n\n
A. J. Grine, N. Quack, K. Grutter, T. O. Rocheleau, J. Huang, C. T.-C. Nguyen, and M. C. Wu, \u201cWafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references<\/a>,\u201d Proceedings<\/em>, 2012 Int. Conf. on Optical MEMS and Nanophotonics (MOEMS\u201912), Aug. 6-9, 2012, pp. 51-52.<\/p>\n","protected":false},"excerpt":{"rendered":"