The year 1996 produced the first correctly designed (i.e., with beam resonators, coupling beam, and termination resistance chosen using a proper design flow) spring-coupled micromechanical IF filter. (In previous publications, we just slapped mechanical parts together and hoped for the best. Yes, a crude approach, but that’s exploration. It’s a good thing we had the courage to explore.)<\/p>\n\n\n\n
F. D. Bannon III and C. T.-C. Nguyen, \u201cHigh frequency microelectromechanical IF filters<\/a>,\u201d Technical Digest<\/em>, 1996 IEEE Electron Devices Meeting, San Francisco, CA, Dec. 8-11, 1996, pp. 773-776.<\/p>\n","protected":false},"excerpt":{"rendered":"