{"id":183,"date":"2020-07-15T02:13:30","date_gmt":"2020-07-15T02:13:30","guid":{"rendered":"http:\/\/localhost\/ctnsite\/?page_id=183"},"modified":"2021-06-06T01:53:40","modified_gmt":"2021-06-06T01:53:40","slug":"1999-publications","status":"publish","type":"page","link":"http:\/\/localhost\/ctnsite\/1999-publications\/","title":{"rendered":"1999 Publications"},"content":{"rendered":"\n

1990<\/a> | 1991<\/a> | 1992<\/a> | 1993<\/a> | 1994<\/a> | 1995<\/a> | 1996<\/a> | 1997<\/a> | 1998<\/a> | 1999<\/a><\/h2>\n\n\n\n
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VHF Free-Free Beam: First Resonator to Reach 92-MHz with Q >7,000 [1999]
Read More<\/a><\/figcaption><\/figure><\/li>
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First Demonstration of Localized Annealing for Drive Reduction [1999]
Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\n
The year 1999 yielded the first micromechanical resonator with center frequency near 100-MHz and Q<\/em> greater than 7,000, debunking a popular belief at the time that useful MEMS-based resonators were limited to the low tens of megahertz. This resonator introduced concepts instrumental to maximizing the Q<\/em> of high frequency resonators still in use today, including and especially non-intrusive quarter wavelength supports to isolate the resonator from its substrate and virtually levitate it. This year also brought the first practical application of the in situ <\/em>localized annealing method introduced in 1997 for the purposes of resonator drift reduction.<\/p>\n\n\n\n
K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen, \u201cVHF free-free beam high-Q<\/em> micromechanical resona\u00adtors<\/a>,\u201d Technical Digest<\/em>, 12th International IEEE Micro Electro Mechanical Systems Conference, Orlando, Florida, Jan. 17-21, 1999, pp. 453-458.<\/p>\n\n\n\n
C. T.-C. Nguyen, A.-C. Wong, and H. Ding, \u201cTunable, switchable, high-Q<\/em> VHF microelectromechanical bandpass filters<\/a>,\u201d Digest of Technical Papers<\/em>, 1999 IEEE International Solid-State Circuits Conference, San Francisco, California, Feb. 15-17, 1999, pp. 78-79, 448.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cMicromechanical filters for miniaturized\u00a0low-power communications (invited)<\/a>,\u201d\u00a0Proceedings of SPIE<\/em>: Smart Structures and Materials (Smart Electronics and MEMS),\u00a0Newport Beach,\u00a0California, March 1-5, 1999, pp. 55-66.<\/p>\n\n\n\n
C. T.-C. Nguyen and R. T. Howe, \u201cAn integrated CMOS micromechanical resonator high-Q<\/em> oscillator<\/a>,\u201d IEEE J. Solid-State Circuits<\/em>, vol. 34, no. 4, pp. 440-455, April 1999. (16 pages)<\/p>\n\n\n\n
T. C. Nolan, C. T.-C. Nguyen, and W. E. Stark, \u201cDirect down-conversion of passband signals using MEMS filters and sub-sampling<\/a>,\u201d\u00a0Proceedings<\/em>\u00a0of the 1999 IEEE Vehicular Technology Conference, Amsterdam, The Netherlands, Sept. 19-22, 1999, pp. 1896-1899.<\/p>\n\n\n\n
V. L. Rabinovich, M. Deshpande, J. R. Gilbert, M.-A. Getillat, N. de Rooij, J. R. Clark, and C. T.-C. Nguyen, \u201cPrediction of mode frequency shifts due to electrostatic bias,\u201d Digest of Technical Papers<\/em>, 10^{th <\/sup>International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 442-445.<\/p>\n\n\n\n}
J. Cao and C. T.-C. Nguyen, \u201cDrive amplitude dependence of micromechanical resonator series motional resistance<\/a>,\u201d Digest of Technical Papers<\/em>, 10^{th <\/sup>International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1826-1829.<\/p>\n\n\n\n}
W.-T. Hsu, S. Lee, and C. T.-C. Nguyen, \u201cIn situ localized annealing for contamination resistance and enhanced stability in nickel micromechanical resonators<\/a>,\u201d Digest of Technical Papers<\/em>, 10^{th <\/sup>International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 932-935.<\/p>\n\n\n\n}
A.-C. Wong, J. R. Clark, and C. T.-C. Nguyen, \u201cAnneal-activated, tunable, 65MHz micromechanical filters<\/a>,\u201d Digest of Technical Papers<\/em>, 10^{th <\/sup>International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10, 1999, pp. 1390-1393.<\/p>\n\n\n\n}
C. T.-C. Nguyen, \u201cMicromechanical components for miniaturized low-power communications (invited)<\/a>,\u201d\u00a0Proceedings<\/em>, 1999 IEEE MTT-S International Microwave Symposium RF MEMS Workshop (on Microelectromechanical Devices for RF Systems: Their Construction, Reliability, and Application),\u00a0Anaheim,\u00a0California,\u00a0June 18, 1999, pp. 48-77.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cFrequency-selective MEMS for miniaturized low-power communication devices (invited)<\/a>,\u201d IEEE Trans. Microwave Theory Tech<\/em>., vol. 47, no. 8, pp. 1486-1503, Aug. 1999. (18 pages)<\/p>\n\n\n\n
J. W. Weigold, A.-C. Wong, C. T.-C. Nguyen, and S. W. Pang, \u201cA merged process for thick single crystal Si resonators and conventional BiCMOS Circuitry<\/a>,\u201d IEEE\/ASME J. Microelectromech. Syst.<\/em>, vol.\u00a08, no.\u00a03, pp.\u00a0221-228, Sept. 1999. (8 pages)<\/p>\n\n\n\n
K. Wang and C. T.-C. Nguyen, \u201cHigh-order medium frequency micromechanical electronic filters<\/a>,\u201d IEEE\/ASME J. Microelectromech. Syst<\/em>., vol. 8, no. 4, pp. 534-557, Dec. 1999. (24 pages).<\/p>\n","protected":false},"excerpt":{"rendered":"
The year 1999 yielded the first micromechanical resonator with center frequency near 100-MHz and Q greater than 7,000, debunking a popular belief at the time that useful MEMS-based resonators were limited to the low tens […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/183"}],"collection":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/comments?post=183"}],"version-history":[{"count":18,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/183\/revisions"}],"predecessor-version":[{"id":1220,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/183\/revisions\/1220"}],"wp:attachment":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/media?parent=183"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}