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The First Micromechanical Disk Resonator [2000]
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Geometric-Stress Temperature Compensated 10-MHz Resonator [2000]
Read More<\/a><\/figcaption><\/figure><\/li><\/ul><\/figure>\n\n\n\nThe year 2000 brought on a slew of invited publications on MEMS-based communication architectures as well as numerous advances in RF MEMS devices, both vibrating and non-vibrating. The year began with publication of the first dog bone serpentine spring-suspended RF MEMS switch–something repeated multiple times by other researchers in the MTT RF MEMS arena. In addition, a tunable capacitor based on a movable dielectric (as opposed to the movable conductors of earlier renditions) introduced a method to raise the Q<\/em> of such devices. The year also saw the first paper looking into temperature compensation of micromechanical beam resonators using geometric stress-compensation, which made more plausible the use of MEMS for timing and frequency control applications. Finally, the first paper to introduce a radial contour-mode micromechanical disk resonator appeared in this year as a precursor to a countless more papers from the field using disks, rings, and other bulk resonance modes towards much higher frequencies.<\/p>\n\n\n\n
F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, \u201cHigh frequency micromechanical filters<\/a>,\u201d IEEE J. Solid-State Circuits<\/em>, vol. 35, no. 4, pp. 512-526, April 2000. (15 pages)<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cMicromechanical circuits for communications (invited)<\/a>,\u201d\u00a0Proceedings<\/em>, 2000 Int. Conference on High Density Interconnect and Systems Packaging, Denver, Colorado, April 25-28, 2000, pp.\u00a0112-117.<\/p>\n\n\n\n
S. Pacheco, L. P. B. Katehi, and C. T.-C. Nguyen, \u201cDesign of low actuation voltage RF MEMS switches<\/a>,\u201d\u00a0Proceedings<\/em>, IEEE MTT-S International Microwave Symposium,\u00a0Boston,\u00a0Massachusetts,\u00a0June 11-16, 2000.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cCommunication architectures based on high-Q<\/em>\u00a0MEMS devices (invited)<\/a>,\u201d\u00a0Workshop Notes<\/em>, Workshop on Microwave and Photonic Applications of MEMS at the 2000 IEEE MTT-S International Microwave Symposium, Anaheim, California, June 16, 2000.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cTransceiver front-end architectures using high-Q<\/em>\u00a0micromechanical resonators (invited)<\/a>,\u201d\u00a0Proceedings<\/em>, IEEE European MIDAS Workshop,\u00a0University of Surrey,\u00a0United Kingdom,\u00a0July 17-18, 2000.<\/p>\n\n\n\n
K. Wang, A.-C. Wong, and C. T.-C. Nguyen, \u201cVHF free-free beam high-Q<\/em> micromechanical resonators<\/a>,\u201d IEEE\/ASME J. Microelectromech. Syst<\/em>., vol.\u00a09, no. 3, pp. 347-360, Sept. 2000. (14 pages)<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cMicromechanical circuits for wireless communications (invited plenary)<\/a>,\u201d\u00a0Proceedings<\/em>, 2000 European Solid-State Device Research Conference, Cork, Ireland, September 11-13, 2000, pp.\u00a02-12.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cMicromechanical circuits for communication transceivers (invited)<\/a>,\u201d\u00a0Proceedings<\/em>, 2000 Bipolar\/BiCMOS Circuits and Technology Meeting (BCTM), Minneapolis, Minnesota, September 25-26, 2000, pp.\u00a0142-149.<\/p>\n\n\n\n
J.-B. Yoon and C. T.-C. Nguyen, \u201cA high-Q<\/em>\u00a0tunable micromechanical capacitor with movable dielectric for RF applications<\/a>,\u201d\u00a0Technical Digest<\/em>, IEEE Int. Electron Devices Meeting,\u00a0San Francisco,\u00a0California,\u00a0Dec. 11-13, 2000, pp. 489-492.<\/p>\n\n\n\n
W.-T. Hsu, J. R. Clark, and C. T.-C. Nguyen, \u201cMechanically temperature compensated flexural-mode micromechanical resonators<\/a>,\u201d\u00a0Technical Digest<\/em>, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 11-13, 2000, pp. 493-496.<\/p>\n\n\n\n
J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, \u201cHigh-Q<\/em>\u00a0VHF micromechanical contour-mode disk resonators<\/a>,\u201d\u00a0Technical Digest<\/em>, IEEE Int. Electron Devices Meeting,\u00a0San Francisco,\u00a0California,\u00a0Dec. 11-13, 2000, pp. 399-402.<\/p>\n","protected":false},"excerpt":{"rendered":"