Technical Digest<\/em>, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 961-964.<\/p>\n","protected":false},"excerpt":{"rendered":"The year 2003 saw considerable advancements in polysilicon resonator performance with the first bulk-mode MEMS resonators (a disk and a ring) to exceed gigahertz frequency, the first extremely high-Q wine-glass disk resonators, and the first […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/175"}],"collection":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/comments?post=175"}],"version-history":[{"count":10,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/175\/revisions"}],"predecessor-version":[{"id":1090,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/175\/revisions\/1090"}],"wp:attachment":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/media?parent=175"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}