The year 2007 brought on the most complex micromechanical circuit up to this point: A differential disk array-composite spring coupled filter that introduced many of the major micromechanical circuit design methods to guide later more complex circuits, including hierarchical topologies, arraying for reduced motional resistance, differential balanced design for mode suppression, and defensive coupling design. Mechanical coupling for Q<\/em> boosting also arrived this year that would eventually drive future optomechanical oscillator designs.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cMEMS technology for timing and frequency control<\/a>,\u201d IEEE Trans. Ultrason., Ferroelect., Freq. Contr<\/em>., vol. 54, no. 2, pp. 251-270, Feb. 2007 (20 pages). (2007 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Best Paper Award Winner<\/em>)<\/strong><\/p>\n\n\n\n
S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, \u201cA micromechanical parallel-class disk-array filter<\/a>,\u201d\u00a0Proceedings<\/em>, 2007 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361.<\/p>\n\n\n\n
L.-W. Hung, Y. Xie, Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, \u201cUHF micromechanical compound-(2,4) mode ring resonators with Solid-Gap Transducers<\/a>,\u201d Proceedings<\/em>, 2006 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375.<\/p>\n\n\n\n
Y. Lin, J. Wang, S. Pietrangelo, Z. Ren, and C. T.-C. Nguyen, \u201cEffect of electrode configuration on the frequency and quality factor repeatability of RF micromechanical disk resonators<\/a>,\u201d Dig. of Tech. Papers<\/em>, the 14th<\/sup> Int. Conf. on Solid-State Sensors & Actuators (Transducers\u201907), Lyon, France, June 11-14, 2007, pp. 2461-2464.<\/p>\n\n\n\n
Y.-W. Lin, L.-W. Hung, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, \u201cQuality factor boosting via mechanically-coupled arraying<\/a>,\u201d Dig. of Tech. Papers<\/em>, the 14th<\/sup> Int. Conf. on Solid-State Sensors & Actuators (Transducers\u201907), Lyon, France, June 11-14, 2007, pp. 2453-2456.<\/p>\n\n\n\n
W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, \u201cUHF nickel micromechanical spoke-supported ring resonators<\/a>,\u201d Dig. of Tech. Papers<\/em>, the 14th<\/sup> Int. Conf. on Solid-State Sensors & Actuators (Transducers\u201907), Lyon, France, June 11-14, 2007, pp. 323-326.<\/p>\n\n\n\n
S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, \u201cAn MSI micromechanical differential disk-array filter<\/a>,\u201d Dig. of Tech. Papers<\/em>, the 14th<\/sup> Int. Conf. on Solid-State Sensors & Actuators (Transducers\u201907), Lyon, France, June 11-14, 2007, pp. 307-311.<\/p>\n","protected":false},"excerpt":{"rendered":"