{"id":1116,"date":"2021-06-04T07:02:21","date_gmt":"2021-06-04T07:02:21","guid":{"rendered":"http:\/\/localhost\/ctnsite\/?page_id=1116"},"modified":"2021-06-05T04:30:36","modified_gmt":"2021-06-05T04:30:36","slug":"1991-publications","status":"publish","type":"page","link":"http:\/\/localhost\/ctnsite\/1991-publications\/","title":{"rendered":"1991 Publications"},"content":{"rendered":"\n

1990<\/a> | 1991<\/a> | 1992<\/a> | 1993<\/a> | 1994<\/a> | 1995<\/a> | 1996<\/a> | 1997<\/a> | 1998<\/a> | 1999<\/a><\/h2>\n\n\n\n
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The Electromechanical Amplitude Modulation Technique That Yielded the First Electrical Measurements of Comb-Driven Folded-Beam Resonance in Air [1991]
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The year 1991 yielded publications that disseminated key techniques to measure the frequency response and other attributes of micromechanical resonators, whether in air (low Q<\/em>) or vacuum (high Q<\/em>). This is where the art of MEMS measurement to circumvent masking parasitics began and culminated with both the Gated Sinusoid and Electromechanical Amplitude Modulation (EAM) techniques.<\/p>\n\n\n\n
C. T.-C. Nguyen and R. T. Howe, \u201cElectromechanical characterization of microresonators for circuit applications<\/a>,\u201d Tech. Dig<\/em>., MICRO Program, 1991.<\/p>\n\n\n\n
C. T.-C. Nguyen, \u201cElectromechanical characterization of microresonators for circuit applications<\/a>,\u201d M. S. Report, Dept. of Electrical Engineering and Computer Sciences, University of California at Berkeley, April 1991.<\/p>\n","protected":false},"excerpt":{"rendered":"
The year 1991 yielded publications that disseminated key techniques to measure the frequency response and other attributes of micromechanical resonators, whether in air (low Q) or vacuum (high Q). This is where the art of […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/1116"}],"collection":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/comments?post=1116"}],"version-history":[{"count":6,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/1116\/revisions"}],"predecessor-version":[{"id":1154,"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/pages\/1116\/revisions\/1154"}],"wp:attachment":[{"href":"http:\/\/localhost\/ctnsite\/wp-json\/wp\/v2\/media?parent=1116"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}