The year 1990 continued exploration of the first comb-driven lateral resonators and produced a follow-on publication expanding on comb-driven folded-beam measurement and analysis.<\/p>\n\n\n\n
W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, \u201cElectrostatic-comb drive of lateral polysilicon resonators<\/a>,\u201d Sensors and Actuators<\/em>, vol. A21-23, pp. 328-331, 1990. (4 pages)<\/p>\n","protected":false},"excerpt":{"rendered":"