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Tsu-Jae King Liu was born in Ithaca, NY in 1963. She received the B.S., M.S. and Ph.D. degrees in Electrical Engineering from Stanford University in 1984, 1986 and 1994, respectively.  She joined the Xerox Palo Alto Research Center as a Member of Research Staff in 1992, to research and develop polycrystalline-silicon thin-film transistor technologies for high-performance flat-panel display and imaging applications. During her tenure with Xerox PARC, she served as a Consulting Assistant Professor of Electrical Engineering at Stanford University. In August 1996 she joined the faculty of the University of California at Berkeley, where she now holds the TSMC Distinguished Professorship in Microelectronics in the Department of Electrical Engineering and Computer Sciences (EECS).  From 2000 to 2004 and from 2006 to 2008, she served as the Faculty Director of the UC Berkeley Microfabrication Laboratory.  From 2003 to 2004, she also served as Vice Chair for Graduate Matters in the EECS Department. In 2004-2006 she was Senior Director of Engineering in the Advanced Technology Group of Synopsys, Inc. (Mountain View, CA).  From July 2008 through June 2012 she was Associate Dean for Research in the College of Engineering.  From July 2012 through June 2016 she was Chair of the Electrical Engineering Division, and from July 2014 through June 2016 she was Chair of the EECS Department. From July 2016 through September 2016 she served as Associate Dean for Academic Planning and Development in the College of Engineering. Since October 2016 she has been serving as Vice Provost for Academic and Space Planning

Dr. Liu's awards include the Ross M. Tucker AIME Electronics Materials Award (1992) for seminal work in polycrystalline silicon-germanium thin films, an NSF CAREER Award (1998) for research in thin-film transistor technology, the DARPA Significant Technical Achievement Award (2000) for development of the FinFET, the Electrical Engineering Award for Outstanding Teaching at UC Berkeley (2003), the IEEE Kiyo Tomiyasu Award (2010) for contributions to nanoscale MOS transistors, memory devices, and MEMs devices, the Electrochemical Society Dielectric Science and Technology Division Thomas D. Callinan Award (2011) for excellence in dielectrics and insulation investigations, the Intel Outstanding Researcher in Nanotechnology Award (2012), the SIA University Researcher Award (2014), and the SRC Aristotle Award (2016).  Her research activities are presently in nanometer-scale logic and memory devices, and advanced materials, process technology, and devices for energy-efficient electronics.  She has authored or co-authored 500
publications and holds over 90 patents

Dr. Liu is a Fellow of the
Institute of Electrical and Electronics Engineers (IEEE) and a past member of The Electrochemical Society (ECS), the Society for Information Display (SID), and the Materials Research Society (MRS). She has served on committees for many technical conferences including the Device Research Conference, the International Conference on Solid State Devices and Materials, the International Electron Devices Meeting, and the Symposium on VLSI Technology, was a member of the IEEE EDS VLSI Technology and Circuits Technical Committee.  She presently serves as a member of the NAE (North America and Europe) Executive Committee of the Symposia on VLSI Technology and Circuits, as Editor-in-Chief for IEEE Electron Device Letters, and on the Board of Directors for Intel Corporation.

Last updated October 1, 2016