Instabilities in Inductive Discharges

4/25/99


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Table of Contents

Instabilities in Inductive Discharges

Motivation

Accomplishments

Previously Reported Work

TuszewskiĆ­s Experiment

Measurements of Stable and Unstable Behavior

Instability Pressure Windows

Instability RF Power Dependence

Experimental Results on Berkeley TCP

PPT Slide

PPT Slide

PPT Slide

PPT Slide

PPT Slide

End-On View of 5.4 mTorr Discharge

Theoretical Model of Instability

Theory Model Details

Instability Mechanism

Onset of Instability (Hopf Bifurcation)

Onset of Instability (Hopf Bifurcation)

Relaxation Oscillation

Relaxation Oscillation

Potential Collapse

Potential Collapse

Second Year Plans

Author: Michael A. Lieberman

Email: someone@microsoft.com

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