Instabilities in Inductive Discharges
Motivation
Accomplishments
Previously Reported Work
TuszewskiĆs Experiment
Measurements of Stable and Unstable Behavior
Instability Pressure Windows
Instability RF Power Dependence
Experimental Results on Berkeley TCP
PPT Slide
End-On View of 5.4 mTorr Discharge
Theoretical Model of Instability
Theory Model Details
Instability Mechanism
Onset of Instability (Hopf Bifurcation)
Relaxation Oscillation
Potential Collapse
Second Year Plans
Email: someone@microsoft.com
Download presentation source