Simulation of Linear Electrostatic Stepper Motor (a MEMS Device) Using Impulse



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Simulation of Linear Electrostatic Stepper Motor (a MEMS Device) Using Impulse

Yan Zhuang
Instructor: John Canny
EECS, Computer Science Division
University of California, Berkeley

May 17th, 1996

Many thanks to the following people:

Abstract:

To facilitate the research and development of micro-electro-mechanical-system (MEMS) , high level design tools are needed. Simulation based on the CAD model would be extremely helpful in synthesizing and improving the design. In this report, we present the simulation of the linear electrostatic stepper motors [8] using Impulse: an impulse-based rigid body dynamic simulator [5][4].





Yan Zhuang
Fri May 31 12:27:18 PDT 1996