Simulation of Linear Electrostatic Stepper Motor (a MEMS
Device) Using Impulse
Next: Introduction
Simulation of Linear Electrostatic Stepper Motor (a MEMS
Device) Using Impulse
Yan Zhuang
Instructor: John Canny
EECS, Computer Science Division
University of California, Berkeley
May 17th, 1996
Many thanks to the following people:
Abstract:
To facilitate the research and development of
micro-electro-mechanical-system (MEMS)
, high level design
tools are needed. Simulation based on the CAD model would be
extremely helpful in synthesizing and improving the design. In this
report, we present the simulation of the linear electrostatic stepper motors [8] using Impulse: an
impulse-based rigid body dynamic simulator [5][4].
Yan Zhuang
Fri May 31 12:27:18 PDT 1996