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Must Read Papers:

1.51-GHz with Q >10,000 Even in Air!
A result of purposely impedance-mismatching a polydiamond disk with its polysilicon stem.


1.2-GHz with Q = 14,600!

Who says diamond is needed to get Q >10,000 at GHz frequencies? With the right "hollow-disk" ring design, polysilicon can do even better than diamond.



60-MHz Wine-Glass Disk Oscillator Makes the GSM Reference Oscillator Spec!
Higher power handling and a Q >50,000 crucial in making the spec.



Arraying for Impedance <480W at 72MHz!
Mechanically coupled resonator arrays automatically align resonator frequencies to allow output summation for low impedance and higher power handling.



Latest Vibrating RF MEMS Overview Presentation (2005)


The Latest Award Winning Papers:

Solid-Gap Vibrating Micromechanical Resonator Wins Best Paper Award at the 2005 IEEE Int. Frequency Control Symposium!
Congratulations to Yu-Wei Lin for winning the Best Frequency Control Paper Award at the 2005 IEEE  Int. Frequency Control Symposium.


Chip-Scale Atomic Clock Overview Paper Wins the Jack Raper Award at the 2005 IEEE Int. Solid-State Circuits Conference!
Congratulations to all those in the CSAC program (which Prof. Nguyen ran while at DARPA), especially John Kitching from NIST, who co-authored this paper.


Vibrating RF MEMS Wins Best Invited Paper Award at the 2004 IEEE Custom Integrated Circuits Conference!
Read this for an overview on vibrating RF MEMS.


Resonator Array Oscillator Wins 2004 UFFC Symposium Best Frequency Control Paper Award!
Congratulations to Seungbae Lee for winning the Best Frequency Control Paper Award at the 2004 IEEE Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf.


Ext. Wine-Glass Resonator Work Wins 2003 IEDM Best Paper Award!
Congratulations to Yuan Xie for winning the 2003 Int. Electron Devices Meeting Roger A. Haken Best Student Paper Award.


Plenary and Keynote Presentations by Prof. Nguyen:

9/17/06 – 9/20/06* (Plenary)

“Towards LSI Vibrating Micromechanical Signal Processors,” 2006 Int. Conf. on Micro- and Nano-Engineering, Barcelona, Spain.

8/5/06 (Keynote) "Advances in RF MEMS and MEMS-Based RF Front-End Architectures," 1st Int. Workshop on Technology and Policy for Accessing, Boston, Massachusetts.

4/25/06 – 4/26/06* (Keynote)

“MEMS Technologies and Devices for Single-Chip RF Front-Ends,” 2005 IMAPS/ACerS Int. Conf. on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Denver, Colorado.

1/25/06 – 1/27/06 (Keynote)

“From MEMS to NEMS: Smaller is Still Better,” 2006 MIT/MTL Annual Research Conference, Waterville Valley, New Hampshire.

8/29/05 – 8/31/05 (Plenary)

“MEMS for Frequency Control and Timing,” 2005 IEEE Combined Frequency Control/Precision Time  & Time Interval Symposium, Vancouver, Canada.

1/22/05 - 1/27/05 (Plenary)

“Vibrating RF MEMS Overview: Applications to Wireless Communications,” 2005 SPIE MOEMS-MEMS Micro & Nanofabrication Symposium, San Jose, California.

11/17/04 - 11/18/04 (Keynote)

“MEMS Programs in DARPA/MTO,” 2004 Nano and Microsystems Technology and Metrology Workshop, Huntsville, Alabama.

5/6/03 (Keynote)

“MEMS: Generalizing the Benefits of Miniaturization,” TEXMEMS2003, Austin, Texas.

2/24/03 - 2/27/03 (Keynote)

“MEMS Technologies for Communications,” Nanotech 2003 Conf., San Francisco, California.

6/24/02 - 6/26/02 (Keynote)

“RF MEMS for Wireless Applications,” 2002 Device Research Conf., Santa Barbara, California.

7/4/01 - 7/6/01 (Keynote)

“Vibrating RF MEMS for Low Power Wireless Communications,” 2001 International MEMS Workshop, Singapore.

9/11/00 - 9/13/00 (Plenary)

“Micromechanical circuits for wireless communications,” 2000 European Solid-State Device Research Conference, Cork, Ireland.

7/12/99 - 7/14/99 (Keynote)

“Vibrating micromechanical resonators for miniaturized low-power communications,” 11th International Conference on Wireless Communications (Wireless’99), Calgary, Canada.

9/20/98 - 9/22/98 (Plenary)

 “Micromachining technologies for miniaturized communication devices,” 1998 SPIE MEMS Conference, Santa Clara, California.

1/25/98 - 1/29/98 (Plenary)

“Micromechanical devices for wireless communications,” 1998 IEEE International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany.
















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