1.51-GHz with Q
>10,000 Even in Air!
A result of
purposely impedance-mismatching a polydiamond disk with its polysilicon stem.
1.2-GHz with Q = 14,600!
Who says diamond is needed to get Q
>10,000 at GHz frequencies? With the right "hollow-disk" ring
design, polysilicon can do even better than diamond.
60-MHz Wine-Glass Disk Oscillator Makes
the GSM Reference Oscillator Spec!
handling and a Q >50,000 crucial in making the spec.
Arraying for Impedance <480W at 72MHz!
coupled resonator arrays automatically align resonator frequencies to allow
output summation for low impedance and higher power handling.
Resonator Oscillator: The First Working Combined MEMS/Transistor Circuit
Using the MICS Process (1993)
Micromechanical Resonator Wins
Best Paper Award at the 2005 IEEE Int. Frequency Control Symposium!
to Yu-Wei Lin for winning the Best Frequency Control Paper Award at the 2005
IEEE Int. Frequency Control Symposium.
Clock Overview Paper Wins the Jack Raper Award at the
2005 IEEE Int. Solid-State Circuits Conference!
to all those in the CSAC program (which Prof. Nguyen ran while at DARPA),
especially John Kitching from NIST, who co-authored this paper.
Vibrating RF MEMS Wins
Best Invited Paper Award at the 2004 IEEE Custom Integrated Circuits
Read this for an
overview on vibrating RF MEMS.
Oscillator Wins 2004 UFFC
Symposium Best Frequency Control Paper Award!
to Seungbae Lee for winning the Best Frequency Control Paper Award at the 2004
IEEE Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint
Resonator Work Wins 2003 IEDM Best Paper Award!
to Yuan Xie for winning the 2003 Int. Electron Devices Meeting Roger A. Haken
Best Student Paper Award.
Micro-Oven Controlled Micromechanical Resonator (1993)
T.-C. Nguyen and R. T. Howe, “CMOS Micromechanical Resonator
Digest, IEEE International Electron Devices Meeting, Washington,
DC, pp. 199-202,
December 5-8, 1993
T.-C. Nguyen and R. T. Howe, “Microresonator
frequency control and stabilization using an integrated micro oven,” Digest
of Technical Papers, the 7th International Conference on Solid-State
Sensors and Actuators (Transducers’93), Yokohama, Japan, pp. 1040-1043, June 7-10, 1993.